Highty Conductive and Transparent Silicon Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-09-20

著者

• Sato Hisao

  Nitride Semiconductor Co. Ltd.

• Sato H

  Research And Development Center Gunze Limited

• MINAMI Tadatsugu

  Electron Device System Laboratory, Kanazawa Institute of Technology

• TAKATA Shinzo

  Electron Device System Laboratory, Kanazawa Institute of Technology

• SATO Hirotoshi

  Electron Device System Laboratory, Kanazawa Institute of Technology

• NANTO Hidehito

  Electron Device System Laboratory, Kanazawa Institute of Technology

• Takata Shinzo

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Nanto Hidehito

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Miyata Takeo

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Miyata T

  Optoelectronic Device System R&d Center Kanazawa Institute Of Technology

• Minami Tadatsugu

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Sato Hisao

  Department of Applied Physics, Graduate School of Engineering, Tohoku University

関連論文

• Effect of Gas-Flow Velocity on Transient Behavior of Gain Constant in a Fast-Axial Flow Type CO_2 Laser Amplifier : Waves, Optics and Quantum Electronics
• Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography : Lithography Technology
• Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography
• Malignant Schwannoma Arising in Patients with Von Recklinghausen's Disease : Report of Two Cases and the Comparison of Mast Cells between Benign and Malignant Portions
• Magnetic-Field-Induced Enhancement of the Vortex Pinning in the Overdoped Regime of La_Sr_xCuO_4 : Relation to the Microscopic Phase Separation(Condensed matter : electronic structure and electrical, magnetic, and optical properties)
• High-Luminance Green-Emitting Thin-Film Electroluminescent Devices Using ZnGa_2O_4:Mn Phosphor
• Ohmic Contact to P-Type GaN
• Transport and Magnetic Properties of Pb_2Sr_2Y_Ca_xCu_3O_ : II-D Transport Properties : II Oxide Superconductors; Experiments II : Electronic States
• Upper Critical Field and Critical Current Density in Ceramic Samples of Pb_2Sr_2Y_Ca_Cu_3O_
• Lateral Overgrowth of Thick GaN on Patterned GaN Substrate by Sublimation Technique
• Direct Evidence that Dislocations are Non-Radiative Recombination Centers in GaN
• Study of Threading Dislocations in Wurtzite GaN Films Grown on Sapphire by Metalorganic Chemical Vapor Deposition
• Surface Pretreatment of Bulk GaN for Homoepitaxial Growth by Metalorganic Chemical Vapor Deposition
• Fabrication of High-Output-Power AlGaN/GaN-Based UV-Light-Emitting Diode Using a Ga Droplet Layer
• Specific Heat and Superconductivity of Ba_2YCu_3O_y.
• Bulk Superconductivity of Y-Ba-Cu-O and Er-Ba-Cu-O
• Control of Emission Wavelength of GaInN Single Quantum Well, Light Emitting Diodes Grown by Metalorganic Chemical Vapor Deposition in a Split-Flow Reactor
• Structure, Composition, and Vibrational Property of Iodine-Doped Polyvinyl Alcohol Studied by Temperature-Dependent I K-Edge Extended X-Ray-Absorption Fine Structure
• Local Structures of RbBr_xCl_ and CuBr_xCl_ Solid Solutions Studied by Temperature-Dependent Br K-Edge Extended X-Ray-Absorption Fine-Structure Spectroscopy
• Compositional Inhomogeneity of InGaN Grown on Sapphire and Bulk GaN Substrates by Metalorganie Chemical Vapor Deposition
• X-Ray Diffraction Analysis of GaN and GaN/InGaN/GaN Double-Hetero Structures Grown on Sapphire Substrate by Metalorganic Chemical Vapor Deposition
• Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region
• High-Efficiency Oxide Heterojunction Solar Cells Using Cu_2O Sheets
• Highly Transparent and Conductive Zinc-Stannate Thin Films Prepared by RF Magnetron Sputtering
• Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc Acetylacetonate
• Large-Area Milky Transparent Conducting Al-Doped ZnO Films Prepared by Magnetron Sputtering
• Reactive Ion Etching Using Electron Cyclotron Resonance Hydrogen Plasma with n-Butyl Acetate Reactive Gas : Etching
• Reactive Ion Etching Using Electron Cyclotron Resonance Hydrogen Plasma with n-Butyl Acetate Reactive Gas
• Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering
• Highty Conductive and Transparent Silicon Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
• Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
• Enhancement of Electronic Anomalies in Iron-Substituted La_Sr_xCu_Fe_yO_4 around x=0.22
• Properties of Hydrophone with Porous Piezoelectric Ceramics : Piezoelectrics
• Effect of Driving Frequency on the EL Characteristics of Thick Ceramic Insulating Type TFEL Devices Using Y_2O_3-Based Phosphor Emitting Layer(Electronic Displays)
• High-Luminance Multicolor-Emitting Thin-Film Electroluminescent Devices Using(Y_2 O_3-Ga_2 O_3):Mn Phosphors
• Metalorganic Chemical Vapor Deposition Growth of GaN Using a Split-flow Reactor
• Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique
• Thickness Control of Multilayer Films in Laser-Induced Chemical Vapor Deposition
• Magnetron Sputter-Deposited A1_2O_3/SiO_2 Multilayer Coatings for Kilowatt Excimer Lasers with High Repetition Rates
• Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films
• Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp : Lithography Technology
• Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp
• Phonons in (La_Sr_x)_2CuO_4 and BaPb_Bi_xO_3
• Simple Rhombohedral Structure of C_ under High Pressure
• Magnetic Susceptibility and X-Ray Diffraction Studies on the Growth and Disappearance Processes of the Superconducting Phase in C_K_x
• Highly Conducting and Transparent SnO_2 Thin Films Prepared by RF Magnetron Sputtering on Low-Temperature Substrates : Surfaces, Interfaces and Films
• Properties of Porous PZT Ceramics for Hydorophone Applications : P: PIEZOELECTRICS
• Detection of Defects in Micro-Machine Elements by Using Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes
• Estimation of Elastic Constants from Surface Acoustic Wave Velocity by Inverse Analysis using the Downhill Simplex Method
• Evaluation of Standard Defects Using Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes
• Evaluation of Surface Defects Using Surface Acoustic Waves Generated by Phase Veilocity Scanning of Laser Interference Fringes
• Surface Acoustic Wave Velocity and Attenuation Dispersion Measurement by Phase Velocity Scanning of Laser Interference Fringes
• Highly Transparent and Conductive Zn_2In_2O_5 Thin Films Prepared by RF Magnetron Sputtering
• The Application of the Correlation Method for the EB (Electron Beam) Exposure System : Lithography Technology
• The Application of the Correlation Method for the EB (Electron Beam) Exposure System
• High-Luminance Green Zn_2SiO_4:Mn Thin-Film Electroluminescent Devices Using an Insulating BaTiO_3 Ceramic Sheet
• Flat Panel Light-Emitting Sounder Using Thin-Film EL Devices with a Ceramic Insulating Layer
• Reactive Ion Etching of Transparent Conducting Tin Oxide Films Using Electron Cyclotron Resonance Hydrogen Plasma : Nuclear Science, Plasmas and Electric Discharges
• Low Voltage Driven MOCVD-Grown ZnS:Mn Thin-Film Electroluminescent Devices Using Insulating BaTiO_3 Ceramic Sheets : Optical Properties of Condensed Matter
• High-Quality Zinc Sulfide Thin Films Grown by MOCVD Using Carbon Disulfide as A Sulfur Source : Semiconductors and Semiconductor Devices
• A New de Electroluminescent Device Using Sintered ZnS:Mn Phosphor-Ceramics
• Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
• Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
• Superconductivity and Electrical Resistivity in the T'-Phase Pr_La_Ce_xCuO_
• Electroluminescent Devices with Ga_2O_3 : Mn Thin-Film Emitting Layer Prepared by Sol-Gel Process
• Carbon K-Shell X-Ray Absorption Near-Edge Structure of Solid C_
• Eu-Doped KCl Storage Phosphor for Erasable and Rewritable Optical Memory Utilizing Photostimulated Luminescence Phenomenon
• Improvement of the Cerenkov Radiative Second Harmonic Generation in the Slab Waveguide with a Periodic Nonlinear Optical Susceptibility
• Novel Erasable and Rewritable Optical Memory Utilizing Photostimulated Luminescence in Eu and Sm Codoped SrS Phosphor Ceramics
• KClBr:Eu放射線イメ-ジ媒体
• Crystalline-State Racemization of Cobaloxime Complexes. 21. Racemization of a Bulky (R)-1,2-Bis(ethoxycarbonyl)ethyl Group
• Mn-Activated CaO-Ga_2O_3 Phosphors for Thin-Film Electroluminescent Devices
• Compositional Inhomogeneity of InGaN Grown on Sapphire and Bulk GaN Substrates by Metalorganic Chemical Vapor Deposition

もっと見る 閉じる

スポンサーリンク