Thickness Control of Multilayer Films in Laser-Induced Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-15
著者
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IWABUCHI Takashi
Matsushita Research Institute Tokyo, Inc.
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MUTOH Katsuhiko
Matsushita Research Institute Tokyo, Inc.
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MIYATA Takeo
Matsushita Research Institute Tokyo, Inc.
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Yamada Yuh
National Research Institute For Metals
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Iwabuchi Toshiyuki
Research And Development Group Oki Electric Industry Co. Ltd.
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Miyata Takeo
Matsushita Research Institute Tokyo Inc.
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YAMADA Yuka
Matsushita Research Institute Tokyo, Inc.
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Miyata Takeo
Electron Device System Laboratory Kanazawa Institute Of Technology
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Mutoh K
Matsushita Research Institute Tokyo Inc.
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Mutoh Katsuhiko
Matsushita Research Institute Tokyo Inc.
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Yamada Yuka
Matsushita Research Institute Tokyo Inc.
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