Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp : Lithography Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Kudo K

  Tokyo Inst. Technol. Tokyo Jpn

• Kudo K

  Research Laboratory Of Resources Utilization Tokyo Institute Of Technology

• KUDO Kazuhiro

  Faculty of Engineering, Chiba University

• IWABUCHI Takashi

  Matsushita Research Institute Tokyo, Inc.

• MUTOH Katsuhiko

  Matsushita Research Institute Tokyo, Inc.

• MIYATA Takeo

  Matsushita Research Institute Tokyo, Inc.

• SANO Reiji

  Matsushita Research Institute Tokyo, Inc.

• Kudo Kazuki

  Ntt Interdisciplinary Research Laboratories

• Watanabe Hirohito

  Institute Of Material Science University Of Tsukuba

• Kudo Kazuhiro

  Faculty Of Engineering Chiba University

• Watanabe H

  Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)

• Kudo K

  Tohoku Univ. Sendai Jpn

• Iwabuchi Toshiyuki

  Research And Development Group Oki Electric Industry Co. Ltd.

• Sano Reiji

  Matsushita Research Institute Tokyou Inc

• Sano Reiji

  Matsushita Research Institute Tokyo Inc.

• Miyata Takeo

  Matsushita Research Institute Tokyo Inc.

• TODOKORO Yoshihiro

  Kyoto Research Lab., Matsushita Electronics Corp.

• WATANABE Hisashi

  Kyoto Research Laboratory, Matsushita Electronics Co

• Miyata Takeo

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Mutoh K

  Matsushita Research Institute Tokyo Inc.

• Mutoh Katsuhiko

  Matsushita Research Institute Tokyo Inc.

• Todokoro Y

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Todokoro Yoshihiro

  Kyoto Research Lab. Matsushita Electronics Corporation

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