Miyata Takeo | Electron Device System Laboratory Kanazawa Institute Of Technology

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著作論文

Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography : Lithography Technology
Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography
Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region
Highly Transparent and Conductive Zinc-Stannate Thin Films Prepared by RF Magnetron Sputtering
Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc Acetylacetonate
Large-Area Milky Transparent Conducting Al-Doped ZnO Films Prepared by Magnetron Sputtering
Reactive Ion Etching Using Electron Cyclotron Resonance Hydrogen Plasma with n-Butyl Acetate Reactive Gas : Etching
Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering
Highty Conductive and Transparent Silicon Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
Properties of Hydrophone with Porous Piezoelectric Ceramics : Piezoelectrics
Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique
Thickness Control of Multilayer Films in Laser-Induced Chemical Vapor Deposition
Magnetron Sputter-Deposited A1_2O_3/SiO_2 Multilayer Coatings for Kilowatt Excimer Lasers with High Repetition Rates
Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films
Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp : Lithography Technology
Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp
Highly Conducting and Transparent SnO_2 Thin Films Prepared by RF Magnetron Sputtering on Low-Temperature Substrates : Surfaces, Interfaces and Films
Properties of Porous PZT Ceramics for Hydorophone Applications : P: PIEZOELECTRICS
Highly Transparent and Conductive Zn_2In_2O_5 Thin Films Prepared by RF Magnetron Sputtering
High-Luminance Green Zn_2SiO_4:Mn Thin-Film Electroluminescent Devices Using an Insulating BaTiO_3 Ceramic Sheet
Flat Panel Light-Emitting Sounder Using Thin-Film EL Devices with a Ceramic Insulating Layer
Reactive Ion Etching of Transparent Conducting Tin Oxide Films Using Electron Cyclotron Resonance Hydrogen Plasma : Nuclear Science, Plasmas and Electric Discharges
Low Voltage Driven MOCVD-Grown ZnS:Mn Thin-Film Electroluminescent Devices Using Insulating BaTiO_3 Ceramic Sheets : Optical Properties of Condensed Matter
High-Quality Zinc Sulfide Thin Films Grown by MOCVD Using Carbon Disulfide as A Sulfur Source : Semiconductors and Semiconductor Devices
A New de Electroluminescent Device Using Sintered ZnS:Mn Phosphor-Ceramics
Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

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