Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-02-15

著者

• TOMIKI Tetsuhiko

  Department of Physics, Tohoku University

• Sakai Hirofumi

  Electrotechnical Laboratory

• Kudo K

  Tokyo Inst. Technol. Tokyo Jpn

• Kudo K

  Research Laboratory Of Resources Utilization Tokyo Institute Of Technology

• KUDO Kazuhiro

  Faculty of Engineering, Chiba University

• IWABUCHI Takashi

  Matsushita Research Institute Tokyo, Inc.

• MUTOH Katsuhiko

  Matsushita Research Institute Tokyo, Inc.

• MIYATA Takeo

  Matsushita Research Institute Tokyo, Inc.

• Kudo Kazuki

  Ntt Interdisciplinary Research Laboratories

• Kudo Kazuhiro

  Faculty Of Engineering Chiba University

• MIYAZAKI Kenzo

  Electrotechnical Laboratory

• Tomiki Tetsuhiko

  Department Of Physics Faculty Of Science University Of The Ryukyus

• Kudo K

  Tohoku Univ. Sendai Jpn

• Iwabuchi Toshiyuki

  Research And Development Group Oki Electric Industry Co. Ltd.

• Miyata Takeo

  Matsushita Research Institute Tokyo Inc.

• Miyata Takeo

  Electron Device System Laboratory Kanazawa Institute Of Technology

• Mutoh K

  Matsushita Research Institute Tokyo Inc.

• Mutoh Katsuhiko

  Matsushita Research Institute Tokyo Inc.

関連論文

• Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography : Lithography Technology
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• Anisotropic Optical Spectra of YAlO_3 (YAP) Single Crystals in the Vacuum Ultraviolet Region. III. Spectra of Optical Constants
• Anisotropic Optical Spectra of YAlO_3 (YAP) Single Crystals in the Vacuum Ultraviolet Region. II. Spectra of Reflectivity
• Optical Spectra of Y_3Al_5O_(YAG) Single Crystals in the Vacuum Ultraviolet Region. II
• Anisotropic Optical Spectra of α-Al_2O_3 Single Crystals in the Vacuum Ultraviolet Region.II. Spectra of Optical Constants
• Optical Spectra of Y_2O_3 Single Crystals in the Vacuum Ultraviolet Region. II
• The Optical Spectra of α_Al_2O_3 Single Crystals in the Vacuum Ultraviolet Region
• Optical Spectra of Y_2O_3 Single Crystals in VUV
• Ce^ Centres in YAlO_3 (YAP) Single Crystals
• Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region
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