Crystallization of Sr_<0.7>Bi_<2.3>Ta_O_<9+α> Thin Films by Chemical Liquid Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-09-30
著者
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Osaka T
Department Of Applied Chemistry School Of Science And Engineering Waseda University
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Osaka Tetsuya
Kagami Memorial Laboratory For Materials Science And Technology Waseda University:department Of Appl
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Osaka Tetsuya
Faculty Of Science And Engineering Waseda University
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ONO Sachiko
Advanced Research Center of Science and Engineering, Waseda University
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Maeda Masakatsu
Faculty Of Science And Engineering Waseda University
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Koiwa Ichiro
Semiconductor Technology Laboratories Oki Electric Industry Co. Ltd.
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Koiwa Ichiro
Department Of Applied Chemistry Science And Engineering Waseda University
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Koiwa Ichiro
Microsystem Technology Laboratory Research And Development Group Oki Electric Industry Co. Ltd.
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Iwabuchi Toshiyuki
Research And Development Group Oki Electric Industry Co. Ltd.
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Mita J
Research Laboratory Oki Electric Industry Corporation Ltd.
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Mita Juro
Microsystem Technology Laboratory Research And Development Group Oki Electric Industry Co. Ltd.
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Ono S
Saitama Univ. Urawa‐shi Jpn
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KANEHARA Takao
Microsystem Technology Laboratory, Oki Electric Industry Co., Ltd.
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IWABUCHI Toshiyuki
Microsystem Technology Laboratory, Oki Electric Industry Co., Ltd.
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Kanehara T
Semiconductor Technology Laboratory Research And Development Group Oki Electric Industry Co. Ltd.
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Ono S
Institute Of Industrial Science University Of Tokyo
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Osaka T
Graduate School Of Science And Engineering Waseda University
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Osaka Tetsuya
Department Of Applied Chemistry Science And Engineering Waseda University
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Ono Sachiko
Advanced Research Center Of Science And Engineering Waseda University
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Osaka Tetsuya
Department Of Applied Chemistry Faculty Of Science And Engineering Waseda University
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Osaka Tetsuya
Graduate School Of Advanced Science And Engineering Waseda University
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