MNS-05 ENHANCED RAMAN SPECTROSCOPIC ANALYSIS OF ULTRA-THIN PLASMA CVD DIAMOND-LIKE CARBON FILMS USING MOLECULAR SENSOR WITH PLASMON ANTENNA(Micro/Nanosystem Science and Technology II,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
In this report, crystal structures of ultra-thin diamond-like carbon (DLC) films, coated by a pulse plasma chemical vapor deposition (CVD), are investigated by using an ultra-high sensitive molecular sensor with plasmon antenna. The newly developed sensor exhibits an excellent analytical performance for mono-molecular thin films with a surface enhanced Raman scattering (SERS) effect with a unique antenna structure to focus surface plasmons into the center of the device where the high electric field is generated. Applying the sensor to DLC films, Raman spectra can clearly identify G-band (sp^2) and D-band (sp^3) for thick DLC films (12 nm). Marked changes were observed for Raman spectra of ultra-thin DLC films (less 8nm). Organic molecules by dissociation of acetylene gas can be detected at the interface between DLC films and Ag surface for the sensor.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Osaka Tetsuya
Faculty Of Science And Engineering Waseda University
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YANAGISAWA Masahiro
Institute for Biomedical Engineering, Waseda University
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SHIMAMOTO Naonobu
Nanotechnology Research Laboratory, Waseda University
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AIDA Toshiyuki
Institute for Biomedical Engineering, Waseda University
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SAITO Mikiko
Nanotechnology Research Laboratory, Waseda University
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KATO Kunio
Nanotechnology Research Laboratory, Waseda University
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SUZUKI Masaki
Graduate School of Science & Engineering, Tokyo Institute of Technology
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OHTAKE Naoto
Graduate School of Science & Engineering, Tokyo Institute of Technology
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Ohtake Naoto
Graduate School Of Science & Engineering Tokyo Institute Of Technology
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Ohtake Naoto
Graduate School Of Engineering Nagoya University
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Saito Mikiko
Nanotechnology Research Laboratory Waseda University
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Aida Toshiyuki
Institute For Biomedical Engineering Waseda University
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Shimamoto Naonobu
Nanotechnology Research Laboratory Waseda University
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Yanagisawa Masahiro
Institute For Biomedical Engineering Waseda University
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Suzuki Masaki
Graduate School Of Science & Engineering Tokyo Institute Of Technology
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Kato Kunio
Nanotechnology Research Laboratory Waseda University
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Suzuki Masaki
Graduate School Of Electrical Engineering And Electronics Kanazawa Institute Of Technology
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SAITO Mikiko
Nanotechnology Research Center, Waseda University
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