Effect of the Preparation Conditions of a Pd/Si Dual Seedlayer on the Magnetic Properties of Co/Pd Multilayered Perpendicular Magnetic Recording Media

概要

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A Pd/Si dual seedlayer consisting of a 5-nm-thick Pd layer on a 5-nm-thick Si layer was deposited on a substrate prior to the formation of a [Co/Pd]_n multilayered perpendicular magnetic recording medium, and the effect of the deposition conditions of the dual seedlayer on the magnetic properties of the [Co/Pd]_n multilayered film was investigated The addition of N_2 to the sputtering Ar gas during the Pd upper seedlayer deposition was effective for decreasing the value of α, which is the slope of a perpendicular M-H loop, defined as 4π(dM/dH)_H_ Hc, and reflects the magnitude of intergranular exchange coupling. The value of a was further decreased by post-annealing of the Pd/Si dual seedlayer By combining the effects of N_2 addition and the post-annealing in preparing the Pd/Si dual seedlayer, both an increase in the reproducing resolution (D_50) and a reduction in the medium noise were achieved Furthermore, the preparation conditions were found to influence the surface morphology and the state of chemical bonding of the Pd/Si dual seedlayer.
社団法人日本磁気学会の論文
2003-03-01