Magnetron Sputter-Deposited A1_2O_3/SiO_2 Multilayer Coatings for Kilowatt Excimer Lasers with High Repetition Rates
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-15
著者
-
IWABUCHI Takashi
Matsushita Research Institute Tokyo, Inc.
-
MUTOH Katsuhiko
Matsushita Research Institute Tokyo, Inc.
-
MIYATA Takeo
Matsushita Research Institute Tokyo, Inc.
-
Yamada Yuh
National Research Institute For Metals
-
Iwabuchi Toshiyuki
Research And Development Group Oki Electric Industry Co. Ltd.
-
Miyata Takeo
Matsushita Research Institute Tokyo Inc.
-
YAMADA Yuka
Matsushita Research Institute Tokyo, Inc.
-
FURUYA Nobuaki
Matsushita Research Institute Tokyo, Inc.
-
Furuya Nobuaki
Matsushita Research Institute Tokyo Inc.
-
Miyata Takeo
Electron Device System Laboratory Kanazawa Institute Of Technology
-
Furuya N
Matsushita Research Institute Tokyo Inc.
-
Mutoh K
Matsushita Research Institute Tokyo Inc.
-
Mutoh Katsuhiko
Matsushita Research Institute Tokyo Inc.
-
Yamada Yuka
Matsushita Research Institute Tokyo Inc.
関連論文
- Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography : Lithography Technology
- Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography
- Nucleation and Growth in Undercooled Melts of Bulk-Metallic-Glass Forming Zr_Ni_Al_ Alloy
- Correlation between Film Thickness and Critical Current Density of Sm_Ba_Cu_3O_ Films Deposited by Pulsed Laser Deposition : Superconductors
- Pressure Effects on T_c of Superconductor YBa_2Cu_4O_8
- The Phase Decomposition of YBa_2Cu_3O_ Induced by HIP
- A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam
- Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region
- Biexciton Luminescence from GaN Epitaxial Layers
- Excitonic Emission in GaN Films on AlN Substrates Using Microwave-Excited N Plasma Method
- Fabrication of Fe-Te-S Superconducting Epitaxial Thin Films by Pulsed Laser Deposition
- Effect of c-Axis-Correlated Disorders on the Vortex Diagram of the Pinning State
- Critical Current Density Enhancement around a Matching Field in ErBa_2Cu_3O_ Films with BaZrO_3 Nano-Rods
- Glassy Solidification Criterion of Zr_Cu_Al_ Alloy
- Drastic Increase in the Toughness of Structural Relaxed Hypoeutectic Zr_Cu_Al_ Bulk Glassy Alloy
- Relations between the thermal and mechanical properties of cast Zr-TM-Al (TM: Cu, Ni, or Co) bulk glassy alloys (Special issue on bulk metallic glasses: selected papers from the fifth international conference on bulk metallic glasses (BMGV))
- Fatigue-Strength Enhancement of Cast Zr_Cu_Al_ Glassy Alloys
- Relaxation and Crystallization Behavior of the Zr_Cu_Al_ Metallic Glass
- Evolution of Mechanical Properties of Cast Zr_Cu_Al_ Glassy Alloys by Structural Relaxation
- Characterization of Crystalline Inclusions in Cast Bulk Zr-Cu-Ni-Al Glassy Alloy
- Effect of Ni Addition on Fatigue Properties of Bulk Glassy Zr_Cu_Al_ Alloys
- Electron Beam Welding of Zr_Cu_Ni_Al_ Bulk Glassy Alloys
- Relationship Between the Liquidus Surface and Structures of Zr-Cu-Al Bulk Amorphous Alloys
- Oxygen Embrittlement and Effect of the Addition of Ni Element in a Bulk Amorphous Zr-Cu-Al Alloy
- Rotating-Beam Fatigue Properties of Pd_Cu_Ni_P_ Bulk Glassy Alloy
- Enhancement of Ductility and Plasticity of Zn_Cu_Al_Ni_5 Bulk Glassy Alloy by Cold Rolling
- Growth of a Single Al_Cu_Fe_ Icosahedral Quasicrystal Using the Czochralski Method and Annealing Removal of Strains
- Fatigue Properties and Microstructures of Zr_Cu_Al_Ni_5 Bulk Glassy Alloys
- Preparation of Large Grained AL_Cu_Fe_ Icosahedral Quasivrystal Directly from the Melt
- Growth of Icosahedral Single Quasicrystal and 1/1-Cubic Approximant Single Crystal in an Al-Li-Cu Alloy System by the Czodhralski Method
- Nanocrystalline Zr-Based Bulk Glassy Alloys with High Flexural Strength
- Rotating-Beam Fatigue Strength of Pd_ Cu_ Ni_ P_ Bulk Amorphous Alloy
- Enhancement of Flux-Pinning in Epitaxial Sm_Ba_Cu_3O_y Films by Introduction of Low-T_c Nanoparticles
- A 0.7-μm-Pitch Double Level Al Interconnection Technology for 1-Gbit DRAMs using SiO_2 Mask Al Etching and Plasma Enhanced Chemical Vapor Deposition SiOF
- A Reliable Double Level Interconnection Technology for Giga Bit DRAMs Using SiO_2 Mask Al Etching and PECVD SiOF
- Thermal Decompositiom of Ce0_2 in Ultra High Vacuum as a Cause of Polycrystalline Growth of Si Films on Epitaxial Ce0_2/Si
- Low-Temperature Epitaxial Growth of CeO_2(110)/Si(100) Structure by Evaporation under Substrate Bias
- Analysis of Misoriented Crystal Structure by Ion Channeling Observed Using Ion-Induced Secondary Electrons
- Effect of Anion in Developer on Dissolution Characteristics of Photoresist : Resist Material and Process
- Effect of Anion in Developer on Dissolution Characteristics of Photoresist
- Highly Accurate CO_2 Gas Sensor Using a Modulation-Type Pyroelectric Infrared Detector
- Surface Morphology of YBa_2Cu_3O_ Films Prepared by Metalorganic Chemical Vapor Deposition Using Liquid Sources
- Preparation of A-axis Oriented YBa_2Cu_3O_ Films by Metalorganic Chemical Vapor Deposition Using Liquid Sources
- Preparation of YBa_2Cu_3O_ Thin Films by Metal-Organic Chemical Vapor Deposition Using Liquid Sources
- Rare Earth Substitution Effects and Magnetic Field Dependence of Critical Current in Y_RE_xBa_2Cu_3O_y Coated Conductors with Nanoparticles (RE = Sm, Gd)
- Enhancement of Flux Pinning in Y_Sm_xBa_Cu_3O_y Coated Conductors with Nanoparticles
- Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling
- Structural Characterization of High-Quality ZnS Epitaxial Layers Grown on GaAs Substrates by Low-Pressure Metalorganic Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Evaluation of Thermal Expansion Coefficient of Twinned YBa_2Cu_3O_7-δ Film for Prediction of Crack Formation of Various Substrates
- Temperature Dependence of Free-Exciton Ltuninescence from High-Quality ZnS Epitaxial Layers
- Optical characterization of high-quality ZnS epitaxial films grown by low-pressure metalorganic chemical vapor deposition
- Fabrication of REBa_2Cu_3O_x (RE=Y, Nd) Films on Yttria-Stabilized Zirconia by Liquid Phase Epitaxial Method with Ba-Cu-O-F Flux
- Intense Ultraviolet Electroluminescence Properties of the High-Power InGaN-Based LEDs Fabricated on Patterned Sapphire Substrates
- Growth Mechanism of YBa_2Cu_4O_8(124) Phase in Metalorganic Chemical Vapor Deposition Film
- The 124 Phase in Y-Ba-Cu-O Films Fabricated by Metalorganic Chemical Vapor Deposition
- Surfaces and Interfaces of High-T_c Superconductors for Contact and Junction Formation Studied with Synchrotron Radiation Photoemisison Spectroscopy : High Temperature Superconducting Thin-Films(Solid State Devices and Materials 1)
- Reduction of Inhomogeneous Broadening of Exciton Luminescence in Cd_xZn_Se Ternary Alloys and Cd_xZn_Se-ZnSe Multiple Quantum Wells Grown by Molecular-Beam Epitaxy under Se-Excess Supply
- Radiative Recombination of Hot Electrons in InGaN Single Quantum Well Blue LEDs
- Novel Single-Step Rapid Thermal Oxynitridation Technology for Forming Highly Reliable Electrically Erasable Programmable Read-Only Memory Tunnel Oxide Films
- Kinetics of Rapid Thermal Oxidation of Silicon
- Role of SiN Bond Formed by N_2O-Oxynitridation for Improving Dielectric Properties of Ultrathin SiO_2 Films
- Properties of Hydrophone with Porous Piezoelectric Ceramics : Piezoelectrics
- Effect of Nd422 Addition on Jc in Nd123 Melt-Textured Bulk Superconductor
- Pulsed Field Magnetization of Melt-Processed Y-Ba-Cu-O Bulk Superconductor with No Weak Links
- High-Temperature Superconducting Motor Using Y-Ba-Cu-O Bulk Magnets
- Evidence of Mobile Ag and Growth Mechanism of YBa_2Cu_3O_7-y Films Deposited on Cube Textured Ag Tape by Chemical Vapor Deposition
- Spiral Growth of YBa_2Cu_3O_ Thin Films by Metalorganic Chemical Vapor Deposition Using Liquid-State Sources
- Metallurgical Reactions and Their Relationships to Enhanced Mechanical Strength in Zr-Bearing YBCO Composite Superconductors
- Wear Reduction Method for Frictionally Fast Feeding Piezoactuator
- Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique
- Thickness Control of Multilayer Films in Laser-Induced Chemical Vapor Deposition
- Magnetron Sputter-Deposited A1_2O_3/SiO_2 Multilayer Coatings for Kilowatt Excimer Lasers with High Repetition Rates
- Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films
- Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp : Lithography Technology
- Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp
- RBS/Channeling Study of the Crystallographic Correlation for Epitaxial CeO_2 on Si
- Creep Deformation of Single Al-Ni-Co Decagonal Quasicrystals
- Strain Affected Properties of Icosahedral Al-Pd-Mn Single Ingot
- Preparation of a Decagonal Al-Cu-Co Single Quasicrystal by the Czochralski Method
- Stable Decagonal Quasicrystal in an Al-Mn-Fe-Ge System
- Electrical Characteristics of Metal/Cerium Dioxide/Silicon Structures
- Quantitative Analysis of Oxygen Deficiency in Epitaxial CeO_2 Layers on Siby Detecting ^O Added for Stoichiometry
- Intermediate Amorphous Layer Formation Mechanism at the Interface of Epitaxial CeO_2 Layers and Si Substrates
- Properties of Porous PZT Ceramics for Hydorophone Applications : P: PIEZOELECTRICS
- Titanium Nitride Thin Films Epitaxially Grown by N-Implantation
- Nitriding of Evaporated-Ti Thin Films by Ion Implantation
- Epitaxial Growth of Vanadium Films Evaporated on NaCl Substrates
- Spontaneous Hydrogenation of Ti Films Evaporated on NaCl Substrates I
- Simultaneous Fabrication of Vertical and 45° Mirrors of InP for Surface-Emitting Lasers Using Inclined Cl Ion Beams
- Texture Structure Analysis and Crystalline Quality Improvement of CeO_2(110) Layers Grown on Si(100) Substrates
- The UV Reflectivity Spectra of SrF_2 Single Crystals
- Line Shape Analysis of the Г-Exciton Spectra of NaCl, NaBr and NaI Single Crystals
- Temperature Dependence of the Fundamental Spectra of Potassium-Halides in the Schumann Ultraviolet Region (4.4∼13.5 eV)
- Reflectivity Spectra of KBr and KI Single Crystals in Their Fundamental Region
- The Urbach Tails and Reflection Spectra of NaCl Single Crystals
- Correlation between Anomalous Peak Effect in Magnetic Hysteresis Loop and Nanoscale Structure for NdBa_2Cu_3O_ Single-Crystal Superconductor
- Ionic DC-Conductivities of KCl
- Optical Studies on NaCl Crystals
- Anisotropic Diamagnetic Susceptibility of AlNiCo Quasi-crystal
- Phase Transition and Magnetic Properties of Supercooled Al-Ge-TM(TM=Cr, Fe, Co)Alloys