Titanium Nitride Thin Films Epitaxially Grown by N-Implantation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-04-15

著者

• Nagata Shoichi

  Dep. Of Materials Sci. And Engineering Muroran Inst. Of Technol. 27-1 Mizumoto-cho Muroran Hokkaido

• Nagata Shoichi

  Muroran Inst. Technol. Hokkaido Jpn

• YAMADA Yukio

  Department of Mechanical Engineering and Intelligent Systems, University of Electro-Communications

• Nagata S

  Osaka Univ.

• NAGATA Shinji

  Institute for Chemical Research, Kyoto University

• 粕壁 善隆

  東北大学国際交流センター

• Yoshida Y

  Department Of Energy Engineering And Science Nagoya University

• Yamada Y

  Akita Univ. Akita Jpn

• Yamada Yuh

  National Research Institute For Metals

• YAMAGUCHI Sadae

  Institute for Materials Research, Tohoku University

• Yamaguchi Sadaei

  Institute For Materials Research Tohoku University

• KASUKABE Yoshitaka

  Department of Materials Science and Enginnering, Waseda University

• Fujino Y

  Department Of Quantum Science And Energy Engineering Tohoku University

• Fujino Yutaka

  Department Of Nuclear Engineering Tohoku University

• Nagata S

  Tohoku University

• Nasu Shoichi

  Kanazawa Institute Of Technology

• ITO Atsuyuki

  Department of Quantum Science and Energy Engineering, Tohoku University

• KISHIMOTO Mokuyoshi

  Institute for Mateials Research, Tohoku University

• Ito Atsuyuki

  Department Of Quantum Science And Energy Engineering Tohoku University

• Yamaguchi Sadae

  Institute For Materials Research Tohoku University

• 粕壁 善隆

  Department Of Quantum Science And Energy Engineering Tohoku University

• Kasukabe Yoshitaka

  Department Of Materials Science And Enginnering Waseda University

• Kishimoto M

  Institute For Mateials Research Tohoku University

• Yamada Yukio

  Department Of Mechanical Engineering And Intelligent Systems University Of Electro-communications

• Yamada Yukio

  Department Of Biochemistry Chiba University School Of Medicine

• Yokoyama Yoshihiko

  Superconductivity Research Laboratory, International Superconductivity Technology Center

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