Rutherford Backscattering Spectrometry of Electrically Charged Targets: Elegant Technique for Measuring Charge-State Distribution of Backscattered Ions
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概要
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We found that surface charging during Rutherford backscattering spectrometry (RBS) of sapphire enabled us to measure the charge-state distribution of ions backscattered at the surface. For a Cu/Au-deposited Al2O3 sample, two components, higher- and lower-energy ones, were resolved on both Cu and Au peaks in the RBS random spectrum. For a single-crystalline Al2O3 sample, a double-peak structure was clearly observed on both Al and O surface peaks in the RBS aligned spectrum. The charge-state distribution can be obtained from the intensity of each component. The results obtained here were compared with previous data for the equilibrium charge-state distribution.
- 2006-03-15
著者
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NAGATA Shinji
Institute for Chemical Research, Kyoto University
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TSUCHIYA Bun
Institute for Materials Research, Tohoku University
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Kawatsura Kiyoshi
Department Of Physics Japan Atomic Energy Research Institute
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Takahiro Katsumi
Department Of Electrical Engineering Hiroshima University
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Terai Atsushi
Department of Chemistry and Materials Technology, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
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Naramoto Hiroshi
Advanced Science Research Center, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan
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Yamamoto Shunya
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan
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Nishiyama Fumitaka
Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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Tsuchiya Bun
Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Kawatsura Kiyoshi
Department of Chemistry and Materials Technology, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
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Takahiro Katsumi
Department of Chemistry and Materials Technology, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
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