Effects of Storage Conditions on Imprint Characteristics in SrBi2Ta2O9 Capacitors

概要

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The effects on the imprint characteristics of SrBi2Ta2O9 capacitors of various storage conditions were investigated. It was observed that the hysteresis shifts due to imprint degradations were smaller in the case in which the both electrodes of the capacitors were connected after increasing the temperature of the capacitors that were polarized at room temperature than in the case in which the electrodes were not connected. The acceleration ratio ($R_{\text{acc}}$) of the slope of the hysteresis shift in the capacitors without connected electrodes to that with connected electrodes is 1.35 at 125 °C in device-size capacitors, and the ratio is much less dependent on temperature than the hysteresis shift. Moreover, it was also found that $R_{\text{acc}}$ was smaller in the case in which the process-induced damage located near the interfaces was larger.
2006-09-30