Optical Probe Detection of High-Frequency Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes
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概要
- 論文の詳細を見る
Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm^2 power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.
- 社団法人応用物理学会の論文
- 1994-05-30
著者
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NAGATA Yoshihiko
Mechanical Engineering Laboratory
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KODA Toshio
Mechanical Engineering Laboratory
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Yamanaka Kazushi
Mechanfical Engineering Laboratory
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NAGATA Yujiro
College of Science and Engineering, Aoyama Gakuin University
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Koda T
Mechanical Engineering Laboratory
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Nagata Y
College Of Science And Engineering Aoyama Gakuin University
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Nagata Yujiro
College Of Science & Engineering Aoyama Gakuin University
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Nishino H
Faculty Of Science And Engineering Aoyama Gakuin University
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NISHINO Hideo
Technical Research Institute, Toppan Printing Co., Ltd.
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TSUKAHARA Yusuke
Technical Research Institute, TOPPAN Printing Co., Ltd.
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Tsukahara Y
Technical Research Institute Toppan Printing Co. Ltd.
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Tsukahara Yusuke
Technical Research Institute Toppan Printing Co. Ltd.
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Terada Yasuhiko
Department Of Applied Physics School Of Engineering The University Of Tokyo
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