Electro-Optical Properties and Structures of (Pb, La)(Zr, Ti)O3 and PbTiO3 Films Prepared Using Aerosol Deposition Method
スポンサーリンク
概要
- 論文の詳細を見る
The electro-optical (EO) properties, film structures and far-infrared spectra were measured for lanthanum-modified lead zirconate titanate [PLZT, Pb0.91La0.09(Zr0.65Ti0.35)O3] and lead titanate [PT, PbTiO3] films, prepared by the aerosol deposition (AD) method. The EO response appeared for AD films annealed at over 500°C, and increased as the annealing temperature increased. Downward shifts of the diffraction peaks, compared with diffraction peak positions of the corresponding to powders, were observed for as-deposited PLZT films in X-ray diffraction patterns of $\theta$-$2\theta$ scans. The (200) peaks shifted to higher angles with increasing X-ray incidence angle to the film surface, indicating that the peak shifts were caused by lattice distortion induced by in-plane compressive stress. The (200) peaks shifted to the powder position when annealed at 600°C, which means that the annealing can relax the residual stress. Far-infrared spectroscopy measurements of reflectivity and transmittance were carried out on the PLZT and the PT powders and films, and the IR spectra of PT films were analyzed using the classical damped harmonic oscillator models to determine the oscillation parameters. We observed LO mode degradation and the broadening of the dielectric function peaks on the AD films. The frequencies of the $E$ (1TO) soft-phonon mode of the annealed PT films were shown to have downward shifts of over 20 cm-1, compared with those of bulk ceramics and single crystals, suggesting that the AD may have induced a microscopic lattice degradation in the PT films, which may be responsible for the small EO response.
- 2004-09-15
著者
-
Ohashi Keishi
Fundamental And Environmental Research Laboratories Nec Corporation
-
Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
-
Nakada Masafumi
Fundamental And Environmental Research Laboratories Nec Corporation
-
Ohashi Keishi
Fundamental and Environmental Research Laboratories, NEC Corporation, 34 Miyukigakoka, Tsukuba, Ibaraki 305-8501, Japan
-
Nakada Masafumi
Fundamental and Environmental Research Laboratories, NEC Corporation, 34 Miyukigakoka, Tsukuba, Ibaraki 305-8501, Japan
関連論文
- Gigahertz-rate optical modulation on Mach-Zehnder PLZT electro-optic modulators formed on silicon substrates by aerosol deposition
- Heat-cycle endurance and in-plane thermal expansion of Al_2O_3/Al substrates formed by aerosol deposition method
- Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature : Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma
- Effect of Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Films Fabricated by Aerosol Deposition Method
- Aerosol Deposition on Transparent Electro-Optic Films for Optical Modulators(Micro/Nano Fabrication,Microoptomechatronics)
- Highly Enhanced Speed and Efficiency of Si Nano-Photodiode with a Surface-Plasmon Antenna
- Si Nano-Photodiode with a Surface Plasmon Antenna
- ORS-09 DESIGN AND FABRICATION OF PLASMON-ENHANCED OPTICAL HEADS
- What Thickness of the Piezoelectric Layer with High Breakdown Voltage is Required for the Microactuator?
- Hydroxyapatite Coating on Titanium Plate with an Ultrafine Particle Beam
- Hydroxyapatite Film Formation by Aerosol Deposition Method(Physics, Processes, Instruments & Measurements, INTERNATIONAL SYMPOSIUM OF JWRI 30TH ANNIVERSARY)
- Effect of Applied Magnetic Field on Magnetic Properties of Sm-Fe-N Films Prepared by Aerosol Deposition Method
- Microstructures and Magnetic Properties of Sm-Fe-N Thick Films Produced by the Aerosol Deposition Method
- P2-50 Time transient analysis of a high speed optical microscanner(Short presentation for poster)
- Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O_3 Thin Films Prepared by Aerosol Deposition Method
- Fabrication and Characterization of Optical Micro-Electro-Mechanical System Scanning Devices Using BaTiO3-Based Lead-Free Piezoelectric-Coated Substrate Sheet by Aerosol Deposition
- Control of Powder Quality as a Method of Improving the Dielectric Properties of (Ba0.6,Sr0.4)TiO3 Thick Films Fabricated by Aerosol Deposition Method
- Electro-Optical Properties and Structures of (Pb, La)(Zr, Ti)O3 and PbTiO3 Films Prepared Using Aerosol Deposition Method
- Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films
- Strong Influence of Surface Structures on Enhanced Transmission through Subwavelength Hole Arrays
- Periodic microstructures formation on plastic plate by aerosol beam irradiation (溶射特集号)
- Lanthanum-Modified Lead Zirconate Titanate Electro-Optic Modulators Fabricated Using Aerosol Deposition for LSI Interconnects
- Evaluation of Dielectric Properties of Ferroelectric Fine Particles Fabricated by Focused Ion Beam Technique
- Theoretical Investigation of Guide Wave Flowmeter
- Theoretical and Experimental Investigation of Propagation of Guide Waves in Cylindrical Pipe Filled with Fluid
- Electro-Optic Properties of Pb(Zr1-xTix)O3 ($X=0$, 0.3, 0.6) Films Prepared by Aerosol Deposition
- Hydroxyapatite Film Formation on Polylactic Acid Plate by Aerosol Beam Irradiation
- Electro-Optical Properties of (Pb, La)(Zr, Ti)O3 Films Prepared by Aerosol Deposition Method
- Fabrication and Evaluation of Lead-Free Piezoelectric Ceramic LF4 Thick Film Deposited by Aerosol Deposition Method
- Terahertz Near-Field Imaging Using Enhanced Transmission through a Single Subwavelength Aperture
- Alumina Thick Films as Integral Substrates Using Aerosol Deposition Method
- Magnetic Properties and Electromagnetic Wave Suppression Properties of Fe–Ferrite Films Prepared by Aerosol Deposition Method
- Fabrication of (Ba0.6,Sr0.4)TiO3 Thick Films by Aerosol Deposition Method for Application to Embedded Multilayered Capacitor Structures
- Hydroxyapatite Coating on Titanium Plate with an Ultrafine Particle Beam
- Terahertz Wave Enhanced Transmission through a Single Subwavelength Aperture with Periodic Surface Structures
- Dielectric Characteristics of Ferroelectric Films Prepared by Aerosol Deposition in THz Range
- Large Optical Transmission through a Single Subwavelength Hole Associated with a Sharp-Apex Grating
- Ultra small magneto-optic field probe fabricated by aerosol deposition
- Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature —Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma—
- Surface Plasmon Resonance in Novel Nanocomposite Gold/Lead Zirconate Titanate Films Prepared by Aerosol Deposition Method
- High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3 Thick Films Formed by Aerosol Deposition
- Erratum: "Theoretical Investigation of a Guide Wave Flowmeter"
- Annealing Effect on 0.5Pb(Ni1/3Nb2/3)O3-0.5Pb(Zr0.3Ti0.7)O3 Thick Film Deposited By Aerosol Deposition Method