Annealing Effect on 0.5Pb(Ni1/3Nb2/3)O3-0.5Pb(Zr0.3Ti0.7)O3 Thick Film Deposited By Aerosol Deposition Method
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概要
- 論文の詳細を見る
The aerosol deposition method (ADM) is the unique thick film technology based on consolidification by impacting powder particles on a substrate. We prepared a powder of a relaxor ferroelectric material with the composition 0.5Pb(Ni1/3Nb2/3)O3-0.5Pb(Zr0.3Ti0.7)O3 (PNN-PZT) using a solid state reaction process. A PNN-PZT film 10 μm thick was deposited on a YSZ (3 mol % Y2O3-stabilized ZrO2) substrate at room temperature by ADM. The prepared films were annealed from 600 to 900°C to investigate the annealing effect. The PNN-PZT film showed a pure perovskite phase without pyrochlore. As a result of transmission electron microscope (TEM) observation, the mean grain sizes of films annealed at 600 and 850°C were measured to be 83 and 254 nm, respectively. After annealing at 850°C, the values of the piezoelectric constant $d_{31}$ and the dielectric constant at 1 kHz of the PNN-PZT film were measured to be $-164$ pm/V and 2530, respectively.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Kawakami Yoshihiro
Research & Development Unit, NEC TOKIN Corporation, 6-7-1, Koriyama, Taihaku-ku, Sendai, Miyagi 982-8510, Japan
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST), Namiki 1-2-1, Tsukuba, Ibaraki 305-8564, Japan
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Aisawa Shuji
Research & Development Unit, NEC TOKIN Corporation, 6-7-1, Koriyama, Taihaku-ku, Sendai, Miyagi 982-8510, Japan
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Aisawa Shuji
Research & Development Unit, NEC TOKIN Corporation, 6-7-1, Koriyama, Taihaku-ku, Sendai, Miyagi 982-8510, Japan
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