Low-loss Silicon Oxynitride Waveguides and Branches for the 850-nm-Wavelength Region

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概要

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• We developed silicon oxynitride (SiON) waveguides and branches working at around 850 nm wavelength for on-chip optical interconnection. SiON films were deposited by plasma-enhanced chemical vapor deposition (PECVD) and were very transmissive in this wavelength region. The propagation losses of fabricated waveguides were as low as 0.2–0.3 dB/cm. The branches are based on multimode interference (MMI) and exhibited excellent 3 dB characteristics. We also integrated a SiON waveguide with a Si nano-photodiode (PD) with a surface plasmon antenna. A large photocurrent of about 0.1 mA at a coupling length of only 10 μm and a high-speed response of 17 ps were demonstrated for the waveguide-integrated Si nano-PD.

• 2008-08-25

著者

• Ushida Jun

  Mirai-selete

• FUJIKATA Junichi

  MIRAI-Selete

• NISHI Kenichi

  MIRAI-Selete

• OKAMOTO Daisuke

  MIRAI-Selete

• GOMYO Akiko

  MIRAI-Selete

• WATANABE Toshifumi

  NTT Microsystem Integration Labs.

• OHASHI Keishi

  MIRAI-Selete

• FUKUDA Hiroshi

  NTT Microsystem Integration Laboratories

• Yamada Koji

  NTT Microsystem Integration Laboratories, NTT Corporation

• Itabashi Seiichi

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Tsuchizawa Tai

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Watanabe Toshifumi

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Fukuda Hiroshi

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Yamada Koji

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Okamoto Daisuke

  MIRAI-Selete, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan

• Fujikata Junichi

  MIRAI-Selete, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan

• Gomyo Akiko

  MIRAI-Selete, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan

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