Low-Loss Si Wire Waveguides and their Application to Thermooptic Switches
スポンサーリンク
概要
- 論文の詳細を見る
We demonstrate low-loss Si wire waveguides with good thermal stability and thermooptic (TO) switches made from them. The propagation losses of the fabricated waveguides were around 2 dB/cm and the coupling losses to an external fiber were 0.4 dB. These values were achieved by improving the fabrication process and introducing spot-size converters made from inorganic materials. Using these waveguides, we made two types of TO switches, a $1\times 1$ switch with a multimode interference (MMI) branch and a $2\times 2$ switch with a 3-dB directional coupler. Both switches exhibited a high extinction ratio of more than 30 dB at a low electric power of 30 mW and a switching time shorter than 200 μs.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-08-30
著者
-
FUKUDA Hiroshi
NTT Microsystem Integration Laboratories
-
UCHIYAMA Shingo
NTT Microsystem Integration Laboratories
-
Yamada Koji
NTT Microsystem Integration Laboratories, NTT Corporation
-
Itabashi Seiichi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
-
Tsuchizawa Tai
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
-
Watanabe Toshifumi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
-
Yamada Koji
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
-
Uchiyama Shingo
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
関連論文
- Waveguide-Integrated Si Nano-Photodiode with Surface-Plasmon Antenna and its Application to On-chip Optical Clock Distribution
- A Study on the Design and Properties of an SiON/SiO_2 Waveguide : The Effect of the Substrate on Propagation Loss
- LSI on-chip optical interconnection with Si nano-photonics
- Spectral responsivity of Ge pin photodiodes on silicon-on-insulator via selective epitaxial growth (光エレクトロニクス)
- Evaluation of a Diabetes Patient Education Program Consisting of a Three-Day Hospitalization and a Six-Month Follow-Up by Telephone Counseling for Mild Type 2 Diabetes and IGT
- Polarization splitter and rotator for polarization diversity system in silicon-based micro-photonic circuits (光エレクトロニクス)
- Photonic-Band-Gap Waveguides and Resonators in SOI Photonic Crystal Slabs(Photonic Crystals and Their Device Applications)
- Microphotonics Devices Based on Silicon Wire Waveguiding System(Photonic Crystals and Their Device Applications)
- Effect of Post-Growth Annealing on Morphology of Ge Mesa Selectively Grown on Si
- LSI On-Chip Optical Interconnection with Si Nano-Photonics
- Mutation of the p53 Tumor Suppressor Gene in Oral Squamous Cell Carcinoma
- Anaplastic Large Cell Lymphoma (ALCL) in the Oral Mucosa with Repeating Recurrence and Spontaneous Regression of Ulceration : Report of a case
- Monolithic Integration of a Silica-Based Arrayed Waveguide Grating Filter and Silicon Variable Optical Attenuators Based on p--i--n Carrier-Injection Structure
- Fabrication of a Microelectromechanical System Mirror Array and Its Drive Electrodes for Low Electrical Interference in Wavelength-Selective Switches
- Low-loss Silicon Oxynitride Waveguides and Branches for the 850-nm-Wavelength Region
- Compact and Polarization-Independent Variable Optical Attenuator Based on a Silicon Wire Waveguide with a Carrier Injection Structure
- Phase Demodulation of DPSK Signals Using Dual-Bus Coupled Silicon Micro-Ring Resonator
- Integration of Silicon Nano-Photonic Devices for Telecommunications
- Pit Distribution Design for Computer-Generated Waveguide Holography
- Low-Loss Si Wire Waveguides and their Application to Thermooptic Switches