Monolithic Integration of a Silica-Based Arrayed Waveguide Grating Filter and Silicon Variable Optical Attenuators Based on p--i--n Carrier-Injection Structure

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概要

• 論文の詳細を見る

• We demonstrate the monolithic integration of a silica-based arrayed waveguide grating (AWG) filter and silicon (Si) variable optical attenuators (VOAs) by connecting them with spot-size converters (SSCs). The AWG is based on a silica waveguide with an index contrast ($\Delta$) of ${\sim}3$%, and the Si VOA is based on a rib-type Si wire waveguide with a p--i--n lateral diode structure. The integrated device performs wavelength demultiplexing in 16 channels and has fast optical power attenuation with a $-3$ dB bandwidth of 50 MHz in each channel.

• 2010-10-25

著者

• Tsuchizawa Tai

  Ntt Telecommunications Energy Laboratories

• Tsuchizawa Tai

  Ntt Microsystem Integration Labs.

• WATANABE Toshifumi

  NTT Microsystem Integration Labs.

• YAMADA Koji

  NTT Microsystem Integration Labs.

• Wada Tetsuro

  System Lsi Development Center Mitsubishi Electric Corporation

• Tsuchizawa T

  Ntt Telecommunications Energy Lab. Kanagawa Jpn

• SHINOJIMA Hiroyuki

  NTT Microsystem Integration Laboratories

• NISHI Hidetaka

  NTT Microsystem Integration Laboratories

• ITABASHI Sei-ichi

  NTT Microsystem Integration Laboratories

• Park Sungbong

  Department Of Materials Engineering Graduate School Of Engineering The University Of Tokyo

• Park Sungbong

  Ntt Microsystem Integration Laboratories Ntt Corporation

• Nishi Hidetaka

  Ntt Microsystem Integration Laboratories Ntt Corporation

• Watanabe T

  Microsystem Integration Laboratories Ntt Corporation

• Kou Rai

  NTT Microsystem Integration Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan

• Tsuchizawa T

  Microsystem Integration Laboratories Ntt Corporation

• Kou Rai

  Microsystem Integration Laboratories Ntt Corporation

• Yamada K

  Microsystem Integration Laboratories Ntt Corporation

• Itabashi Sei-ichi

  Microsystem Integration Laboratories Ntt Corporation

• Shinojima Hiroyuki

  Ntt Mi Labs Ntt Corporation

• Kou Rai

  Ntt Microsystem Integration Laboratories Ntt Corporation

• Tsuchizawa Tai

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Shinojima Hiroyuki

  NTT MI Laboratories, 27-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Watanabe Toshifumi

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

• Yamada Koji

  NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

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