Neutral Stream Extraction from Electron Cyclotron Resonance Plasma by Using Parallel Magnetic Field
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-04-01
著者
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Tsuchizawa Tai
Ntt Telecommunications Energy Laboratories
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Tsuchizawa Tai
Ntt Lsi Laboratories
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Tsuchizawa Tai
Ntt Microsystem Integration Labs.
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Tsuchizawa T
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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JIN Yoshito
NTT LSI Laboratories
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MATSUO Seitaro
NTT LSI Laboratories
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Jin Y
Ntt Microsystem Integration Laboratories
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Tsuchizawa T
Microsystem Integration Laboratories Ntt Corporation
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- Processing Uniformity Improvement by Magnetic Field Distribution Control in Electron Cyclotron Resonance Plasma Chamber
- Behavior of Reaction Products of Poly-Si in Electron Cyclotron Resonance Ion Stream Etching and Its Application to Stable and High-Selectivity Etching
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