Jin Y | Ntt Microsystem Integration Laboratories
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概要
関連著者
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Jin Y
Ntt Microsystem Integration Laboratories
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JIN Yoshito
NTT LSI Laboratories
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Tsuchizawa Tai
Ntt Telecommunications Energy Laboratories
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Tsuchizawa Tai
Ntt Lsi Laboratories
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Tsuchizawa Tai
Ntt Microsystem Integration Labs.
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Tsuchizawa T
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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HASEGAWA Fumio
Institute of Applied Physics, University of Tsukuba
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MATSUO Seitaro
NTT LSI Laboratories
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KOBAYASHI RYUJI
Institute of Health Sciences, Faculty of Medicine, Hiroshima University
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Kobayashi Ryuji
Institute Of Materials Science University Of Tsukuba
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HASEGAWA Fumio
Tohoku University of Art and Design
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Hasegawa Fumio
Institute Of Applied Physics University Of Tsukuba
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JIN Yoshito
Institute of Materials Science, University of Tsukuba
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Tsuchizawa T
Microsystem Integration Laboratories Ntt Corporation
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HASEGAWA Fumio
Institlite of Materials Science, University of Tsukuba
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Ono Toshiro
Ntt Microsystem Integration Laboratories
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Saito Kunio
Ntt Microsystem Integration Laboratories
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Shimada Masaru
Ntt Microsystem Integration Laboratories
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Yamaguchi H
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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JIN Yoshito
NTT Microsystem Integration Laboratories
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Yamaguchi H
Ntt Basic Research Laboratories
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Fujii Kunihiro
Institute of Materials Science, University of Tsukuba
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YAMAGUCHI Hiromu
Institute of Materials Science, University of Tsukuba
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Yamaguchi Hiromu
Institute Of Materials Science Universityof Tsukuba
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FUJII Kunihiro
Institute of Material Science, University of Tsukuba
著作論文
- Neutral Stream Extraction from Electron Cyclotron Resonance Plasma by Using Parallel Magnetic Field
- Generation of Electron Cyclotron Resonance Neutral Stream and Its Application to Si Etching
- Metal-Oxide-Semiconductor-Diode Characteristics with SiO_2 Films Formed by Oxidation and Sputtering Using Electron-Cyclotron-Resonance-Plasma Stream
- Atomic Layer Epitaxy of GaAs Using GaCl_3 and AsH_3
- Vapor Phase Epitaxy of AlGaAs by Direct Reacion between AlCl_2, GaCl_3 and AsH_3/H_2