Evaluation of the Electron Cyclotron Resonance Plasma Process Using a Microwave Twin-Lead Line Probe
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概要
- 論文の詳細を見る
A plasma measurement method using a parallel twin-lead line probe is developed. An accurate measurement of process plasma such as electron cyclotron resonance plasma can be made even in the presence of an external magnetic field by this method. Measurement errors are estimated to be less than ±10% considering the influence of the electron density distribution and the multiple reflection between the plasma boundaries. The density of electron cyclotron resonance plasma is measured by the method and a high ionization degree of 1 to 10% is confirmed.
- 社団法人応用物理学会の論文
- 1991-10-01
著者
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MATSUO Seitaro
NTT LSI Laboratories
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Matsuo Seitaro
Ntt Lsi Laboratories Nippon Telegraph And Telephone Corporation
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NISHIMURA Hiroshi
NTT LSI Laboratories
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Nishimura Hiroshi
Ntt Lsi Laboratories Nippon Telegraph And Telephone Corporation
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- Evaluation of the Electron Cyclotron Resonance Plasma Process Using a Microwave Twin-Lead Line Probe