Miniature Ultrasonic Motor Using Shear Mode of Potassium Sodium Niobate-Based Lead-Free Piezoelectric Ceramics
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概要
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A miniature piezoelectric ultrasonic motor (USM) using the shear mode of (K,Na)NbO3 (KNN)-based lead-free piezoelectric ceramics was developed. The motor can be driven in the shearing and bending vibration modes. By using the finite-element method, the motor vibration modes and driving mechanism were modeled. Both the “soft-type” (high-$d$ USM) and “hard-type” (high-$Q_{\text{m}}$ USM) KNN-based lead-free piezoelectric ceramics were employed to clarify the characteristics of USMs. The experimental results reveal that the high-$d$ USM widens the band of operational frequency in both vibration modes. In the shearing vibration mode, the high-$d$ USM showed a revolution speed of 416 rpm, a torque of 41.5 μN m, and an efficiency of 0.6%, whereas the high-$Q_{\text{m}}$ USM showed the same characteristics of 313 rpm, 19.6 μN m and 1.6%, respectively. In the bending vibration mode, the characteristics of the high-$Q_{\text{m}}$ USM were 376 rpm, 51.4 μN m and 0.4%; however, the characters of the high-$d$ USM deteriorated owing to the shift in resonance frequency caused by heat generation.
- 2009-09-25
著者
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Li Enzhu
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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SASAKI Ryo
Graduate of Health & Sports Science, Juntendo Univ.
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Hoshina Takuya
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Takeda Hiroaki
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Sasaki Ryo
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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Tsurumi Takaaki
Graduate School of Materials Science and Technology, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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Li Enzhu
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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Takeda Hiroaki
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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