Influence of a TiO2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO2/SiO2/Si Structures

スポンサーリンク

概要

• 論文の詳細を見る

• Three kinds of TiO2 layers were formed on SiO2/Si substrates: (200)-oriented TiO2 with rutile structure, (103)-oriented TiO2 with anatase structure and randomly oriented TiO2. All the Pt films deposited on the TiO2 layers had (111) orientation. Pt films deposited on the rutile TiO2 had a columnar structure and the full-width at half maximum (FWHM) of the rocking curve of the Pt(111) plane was estimated to be 0.88°. The diffusion of TiO2 to the surface of the Pt films hardly occurred in the case of rutile TiO2. The FWHM of the rocking curve of Pt(111) formed on anatase TiO2 was estimated to be 1.55°. The rocking curve of Pt(111) formed on randomly oriented TiO2 consisted of two peaks with centers separated by 6.25°. The diffusion of TiO2 to the surface was observed in the cases of anatase and randomly oriented TiO2. From these results, we concluded rutile TiO2 fabricated by metal deposition and subsequent oxidation was the best material for high-quality bottom Pt electrodes.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-05-15

著者

• Okamura Soichiro

  Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)

• Shiosaki Tadashi

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Kurita Masaaki

  Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)

• Otani Yohei

  Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)

• Abe Norikazu

  Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)

• Miyake Masato

  Graduate School Of Agricultural Science Tohoku University

• Takeda Hiroaki

  Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Takeda Hiroaki

  Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Shiosaki Tadashi

  Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Abe Norikazu

  Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Shiosaki Tadashi

  Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

関連論文

• Cation distribution and piezoelectric properties of aluminum substituted La3Ta0.5Ga5.5O14 single crystals
• Analysis on dipole polarization of BaTiO3-based ferroelectric ceramics by Raman spectroscopy
• Controlling factors of film-thickness in improved aerosol deposition method
• Heat-cycle endurance and in-plane thermal expansion of Al_2O_3/Al substrates formed by aerosol deposition method
• Evaluation of Material Constants and Temperature Properties in Lanthanum Calcium Oxoborate LaCa_4O(BO_3)_3 Single Crystals
• Increase in Switching Charge of Ferroelectric SrBi_2Ta_2O_9 Thin Films with Polarization Reversal
• Conspicuous Voltage Shift of D-E Hysteresis Loop and Asymmetric Depolarization in Pb-Based Ferroelectric Thin Films
• Preparation of La-Modified Lead Titanate Film Capacitors and Influence of SrRuO_3 Electrodes on the Electrical Properties
• Electro-Optic Properties of Lanthanum-Modified Lead Zirconate Titanate Thin Films Epitaxially Grown by the Advanced Sol-Gel Method
• Low Temperature Synthesis of Electrode Films from Silver-Palladium Alloy Powders for Multilayer Ceramic Devices
• Influence of a TiO_2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO_2/SiO_2/Si Structures
• Fabrication of Ferroelectric Microcapacitors with Self-Aligned Top Electrodes by Electron-Beam-Induced Patterning Process
• Thermally Stimulated Current and Polarization Fatigue in Pb (Zr, Ti) O_3 Thin Films
• Variation in 111 d-Space and Generation of Hillocks in Platinum Thin-Film Electrodes by Heat Treatment
• Improvement in Step Coverage of Pb(Zr, Ti)O_3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition
• Investigation of PtNb Alloy Electrodes for Ferroelectric Pb(Zr, Ti)O_3 Thin Film Capacitors
• Fabrication of Ferroelectric Pb(Zr, Ti)O_3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition(Surfaces, Interfaces, and Films)
• Crystal Growth and Characterization of Lanthanum Substituted Bismuth Titanate Single Crystals
• Effect of Oxygen Vacancy and Oxygen Vacancy Migration on Dielectric Response of BaTiO3-Based Ceramics
• Fabrication of Perovskite Manganite (La, Sr)MnO_3 Thin Films by Chemical Solution Deposition and Their Low-Field Magnetoresistance Properties at Room Temperature : Magnetism
• Wide Band Dielectric Spectroscopy at Ferroelectric Phase Transition of BaTiO3 Ceramics
• Muscle type-specific effect of myostatin deficiency on myogenic regulatory factor expression in adult double-muscled Japanese Shorthorn cattle
• Fabrication of Ferroelectric Pb(Zr,Ti)O_3 Thin Films with Various Zr/Ti Ratios by Ink-Jet Printing
• Fabrication of lead-free semiconducting ceramics using a BaTiO3–(Bi1/2Na1/2)TiO3 system by adding CaO
• Thermally Stimulated Current Measurement for Degraded Pb(Ti,Zr)O3 Thin-Film Capacitors
• Formation Mechanism of Oriented Pb(Zr,Ti)O3 Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition
• Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt)2(DPM)2
• Growth and Characterization of Lanthanum Calcium Oxoborate LaCa4O(BO3)3 Single Crystals
• Consideration for Broadband Frequency Conversion Based on Ba0.5Sr0.5TiO3 Films
• Estimation of Parasitic Capacitance in Measurement of Hysteresis Properties of Ferroelectric Microcapacitors Using Scanning Probe Microscope
• Dielectric, Elastic and Piezoelectric Constants of Lanthanum Calcium Oxoborate Single Crystals with Monoclinic Structure of Point Group $m$
• Effects of Ce, Cr and Er Doping and Annealing Conditions on the Microstructural Features and Electrical Properties of PbZrO3 Thin Films Prepared by Sol–Gel Process
• Miniature Ultrasonic Motor Using Shear Mode of Potassium Sodium Niobate-Based Lead-Free Piezoelectric Ceramics
• Positive Temperature Coefficient of Resistivity Effect of Semiconducting BaTiO3–(Bi1/2Na1/2)TiO3 Ceramics Prepared by a Wet-Chemistry Route
• Polar Laser Dyes Dispersed in Polymer Matrices: Reverification of Charge Transfer Character and New Optical Functions
• Local Structure Analysis of Bi2WO6
• Effect of Interface Structure on Electrical Properties of (Ba,Sr)TiO3 Thin Films on Glazed Alumina Substrate
• Depolarization Temperature Shift of Li0.08Na0.92NbO3 Lead-Free Piezoelectric Ceramics by High-Electric-Field Poling
• Preparation of (Pb,La)(Zr,Ti)O3 Epitaxial Thin Films by Modified Sol–Gel Method and Their Crystallinity Evaluation
• Dependence of Microwave Properties of BaxSr1-xTiO3 Thin Films on Substrate
• Investigation of PtNb Alloy Electrodes for Ferroelectric Pb(Zr,Ti)O3 Thin Film Capacitors
• Increased Fatigue Endurance in Pb(Zr,Ti)O3 Thin Films through Use of PbZrO3 Buffer Layers
• Electro-optic Anisotropy of Epitaxially Grown (Pb,La)(Zr,Ti)O3 Films Fabricated by Modified Sol–Gel Process
• Fatigue Behaviour of Pb(Zr,Ti)O3/PbZrO3 Multilayer Ferroelectric Thin Films
• Microstructure and Crystallographic Orientation Dependence of Electrical Properties in Lead Zirconate Thin Films Prepared by Sol–Gel Process
• Investigation of the Electrical Properties of [111] Oriented PbZrO3 Thin Films Obtained by Sol–Gel Process
• Difference between Local and Average Structures of La3Ga5SiO14 Crystal
• Piezoelectric Properties of Sodium Bismuth Tantalate Na0.5Bi2.5Ta2O9 Dense Ceramics
• Influence of a TiO2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO2/SiO2/Si Structures
• Evaluation of Material Constants and Temperature Properties in Lanthanum Calcium Oxoborate LaCa4O(BO3)3 Single Crystals
• Preparation of CoFe2O4 Spin Valves and Improvement of Their Magnetoresistance Property by Postannealing
• Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Spray Metalorganic Chemical Vapor Deposition
• Deposition of SrZrO3 Thin Films Using Liquid Delivery Metal–Organic Chemical Vapor Deposition
• Improvement in Step Coverage of Pb(Zr,Ti)O3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition

もっと見る 閉じる

スポンサーリンク