Improvement in Step Coverage of Pb(Zr, Ti)O_3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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Miyake Masato
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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SHIOSAKI Tadashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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OKAMURA Soichiro
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Okamura Soichiro
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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Shiosaki Tadashi
Research Development Division Sakai Chemical Industry Co. Ltd.
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ABE Norikazu
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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OTANI Yohei
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Abe Norikazu
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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