Fabrication of Ferroelectric Microcapacitors with Self-Aligned Top Electrodes by Electron-Beam-Induced Patterning Process
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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SHIOSAKI Tadashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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OKAMURA Soichiro
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Okamura Soichiro
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Okamura Soichiro
Graduate School Ofmateriafi Science Nara Iostirure Of Science And Technology (naist)
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Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Shiosaki Tadashi
Graduate School Ofmateriafi Science Nara Iostirure Of Science And Technology (naist)
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MAEKAWA Tomofumi
Graduate School ofMateriafi Science, Nara Iostirure of Science and Technology (NAIST)
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SuzuKi Kouzo
Graduate School ofMateriafi Science, Nara Iostirure of Science and Technology (NAIST)
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Suzuki Kouzo
Graduate School Ofmateriafi Science Nara Iostirure Of Science And Technology (naist)
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Maekawa Tomofumi
Graduate School Ofmateriafi Science Nara Iostirure Of Science And Technology (naist)
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Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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