Increased Fatigue Endurance in Pb(Zr,Ti)O3 Thin Films through Use of PbZrO3 Buffer Layers
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概要
- 論文の詳細を見る
Thin PbZrO3 (PZ) films were investigated as a buffer layer to improve fatigue endurance of Pb(Zr0.45Ti0.55)O3 (PZT) thin films. The PZ thin films were deposited on Pt(111)/Ti/SiO2/Si(100) substrates by RF magnetron sputtering from a loose powder target containing a mixture of PbZrO3 and ZrO2 powders. The PZT thin films on the PZ buffer layer were obtained by sol–gel spin coating. The PZ buffered PZT films had well crystallized, uniform and dense microstructure with partial (111) orientation. The $P$–$E$ hysteresis measurements indicated comparable or slightly lower remnant polarization values ($2P_{\text{r}}=50--70$ μC/cm2) and higher coercive field levels compared to unbuffered film ($2P_{\text{r}}=66$ μC/cm2). The PZ buffered films displayed an asymmetric leakage current. The fatigue endurance of PZT thin films with PZ buffer layers was superior compared to the unbuffered counterpart with fatigue-free behavior observed up to $10^{9}$ switching cycles.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-15
著者
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Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Uchiyama Kiyoshi
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan
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Uchiyama Kiyoshi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Mensur Alkoy
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan
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Alkoy Sedat
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan
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Alkoy Sedat
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0101, Japan
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Mensur Alkoy
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0101, Japan
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Shiosaki Tadashi
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan
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Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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