Deposition of SrZrO3 Thin Films Using Liquid Delivery Metal–Organic Chemical Vapor Deposition

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概要

• 論文の詳細を見る

• Proton-conductive SrZrO3 films were successfully deposited on Pt/SiOx/Si and porous stainless-steel substrates by liquid delivery metal–organic chemical vapor deposition (LD-MOCVD). The as-deposited films deposited on the Pt/SiOx/Si substrate at 600 °C showed good crystallinity and post-annealing at temperatures below 800 °C resulted in improved crystallinity. A 200-nm-thick film deposited on the porous stainless-steel substrate was flat and solid and did not show any gas leakage. We consider this deposition technique to be applicable for the fabrication of a new solid oxide fuel cell structure with intermediate-temperature operation.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2009-07-25

著者

• Shiosaki Tadashi

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Yanagimoto Katsu

  Sanyo Special Steel Co. Ltd.

• Yanagimoto Katsu

  Sanyo Special Steel Co., Ltd., Himeji, Hyogo 672-8677, Japan

• Yamada Yoji

  Ion Technology Center Co., Ltd., Hirakata, Osaka 573-0128, Japan

• Kariya Tetsuro

  Sanyo Special Steel Co., Ltd., Himeji, Hyogo 672-8677, Japan

• Uchiyama Kiyoshi

  Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Uchiyama Kiyoshi

  Graduate School of Materials Science, Nara Institute Science and Technology, Ikoma, Nara 630-0101, Japan

• Ikeda Hiroki

  Sanyo Special Steel Co., Ltd., Himeji, Hyogo 672-8677, Japan

• Sakairi Hiroyuki

  Graduate School of Materials Science, Nara Institute Science and Technology, Ikoma, Nara 630-0101, Japan

• Nakayama Akira

  Ion Technology Center Co., Ltd., Hirakata, Osaka 573-0128, Japan

• Shiosaki Tadashi

  Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan

• Shiosaki Tadashi

  Graduate School of Materials Science, Nara Institute Science and Technology, Ikoma, Nara 630-0101, Japan

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