Effect of a driving electric field waveform on piezoelectric displacement of PZT thick films
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概要
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Endurance properties of piezoelectric-induced longitudinal displacement for lead zirconate titanate (PZT) thick films were investigated to develop microelectromechanical systems (MEMS). A 5-µm-thick film was prepared using chemical solution deposition (CSD). Square and triangle waveforms and various frequencies of unipolar or bipolar electric fields were applied to the film. The effects of applied field switching cycles on the ferroelectric properties and longitudinal displacements were measured using a twin-laser interferometer system. Under the bipolar applied field switching condition, the remanent polarization and piezoelectric displacement decreased concomitantly with increasing applied field switching cycles, similar to fatigue behavior. The applied field switching waveform and frequency affect the fatigue profile. The piezoelectric displacement did not decrease when the unipolar square and triangle waveform were applied to the samples. These results suggest that the unipolar driven PZT thick films are applicable to MEMS devices.
著者
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NAKAJIMA Takashi
Department of Urology, Kawasaki Medical School
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IIJIMA Takashi
National Institute of Advanced Industrial Science and Technology
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OKAMURA Soichiro
Department of Applied Physics, Tokyo University of Science
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Okamura Soichiro
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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KASHIWAGI Yuta
Department of Applied Physics, Faculty of Science, Tokyo University of Science
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Nakajima Takashi
Department Of Radiation Oncology Gunma University Graduate School Of Medicine
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Nakajima Takashi
Department Network And Computer Engineering School Of Information And Design Engineering Tokai Unive
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Nakajima Takashi
Department Of Basic Science University Of Tokyo
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NAKAJIMA Takashi
Department of Applied Physics, Faculty of Science, Tokyo University of Science
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Iijima Takashi
National Institute Advanced Industrial Science and Technology (AIST), Tsukuba Center 5, Tsukuba, Ibaraki 305-8565, Japan
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