Properties of Ferroelectric Pb(Zr, Ti)O_3 Thin Films on TiSi_2/Si Substrates
スポンサーリンク
概要
- 論文の詳細を見る
A titanium disilicide (TiSi_2) layer was prepared on Si wafers by Ti evaporation on Si in vacuum followed by heat treatment at 800℃. The sheet electrical resistance of the TiSi_2 layer was estimated to be 1.3 Ω/□ at room temperature. Ferroelectric Pb(Zr, Ti)O_3 thin films was then fabricated on TiSi_2/Si by "the spin-coating pyrolytic process", here and throughout using Pb, Zr and Ti naphthenates. The remanent polarization and coercive field of the PZT film were estimated to be about 0.4 μC/cm^2 and 97 kV/cm, respectively. The potential of the TiSi_2 layer as electrodes for capacitors in a VLSI was demonstrated.
- 社団法人応用物理学会の論文
- 1995-09-30
著者
-
Okamura S
Nara Inst. Sci. And Technol. (naist) Nara Jpn
-
Okamura Soichiro
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
-
Tsukamoto Takeyo
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
-
Tsukamoto T
Department Of Applied Physics Tokyo University Of Science
-
Tsukamoto T
Toshiba Corp. Kawasaki Jpn
-
HATANO Hitoshi
Department of Applied Physics, Faculty of Science, Science University of Tokyo
-
Hatano H
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
-
Ando Shizutoshi
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
関連論文
- Composition dependence of electrooptic property of epitaxial (Pb,La)(Zr,Ti)O3 films
- Effect of a driving electric field waveform on piezoelectric displacement of PZT thick films
- Electronic Structure Characteristics of MBE (molecular beam epitaxy)-Grown Diluted Magnetic Semiconductor Ga_Cr_xN Films
- Electronic Structure of Ce_Nd_xO_ Probed by Soft-X-Ray Spectroscopy
- Band Structure of Sr_Ba_Nb_2O_6 Thin Film Probed by Soft-X-Ray Emission Spectroscopy
- Unoccupied Electronic State of SrTi_Nb_xO_3 Observed by Inverse-Photoemission Spectroscopy
- Unoccupied Electronic State of Delafossite-Type PdCoO_2 Single Crystal Probed Using Inverse Photoemission Spectroscopy
- Evidence of O-H Bond in the Bulk State of Protonic Conductor Y-Doped SrCeO_3 by Soft-X-Ray Spectroscopy
- Electronic Structure of Delafossite-Type Oxide PtCoO_2 by Resonant-Photoemission Spectroscopy
- Band Structure of TiO_2-Doped Yttria-Stabilized Zirconia Probed by Soft-X-Ray Spectroscopy
- Unoccupied Electronic State of Lightly La-Doped SrTiO_3 Observed by Inverse-Photoemission Spectroscopy
- Bulk Electronic State of SrTiO_ Probed by Resonant Soft-X-Ray Emission Spectroscopy
- Oprical Absorption Spectra of Protonic Conductor CaZr_Sc_O_
- Simple Process Synthesis of BaTiO_3-(Ni,Zn,Cu)Fe_2O_4 Ceramic Composite(Cross-disciplinary physics and related areas of science and technology)
- Estimation of Parasitic Capacitance in Measurement of Hysteresis Properties of Ferroelectric Microcapacitors Using Scanning Probe Microscope
- Evaluation of Material Constants and Temperature Properties in Lanthanum Calcium Oxoborate LaCa_4O(BO_3)_3 Single Crystals
- Growth and Characterization of Lanthanum Calcium Oxoborate LaCa_40(BO_3)_3 Single Crystals
- Thermally Stimulated Current Maeasurement for Degraded Pb(Ti,Zr)O_3 Thin-Film Capacitors
- Increase in Switching Charge of Ferroelectric SrBi_2Ta_2O_9 Thin Films with Polarization Reversal
- Conspicuous Voltage Shift of D-E Hysteresis Loop and Asymmetric Depolarization in Pb-Based Ferroelectric Thin Films
- Preparation of La-Modified Lead Titanate Film Capacitors and Influence of SrRuO_3 Electrodes on the Electrical Properties
- Influences of Pr and Mn co-substitution on crystallinity and electric properties of BiFeO3 thin films
- Growth of Ba_Sr_xNaNb_5O_ Thin Film on La_Sr_TiO_3 Substrate by Pulsed Laser Deposition
- A Novel Electrode for Ozone Generation
- Ferroelectric Properties of Bi_4Ti_3O_ Thin Films Prepared on TiO_2 Anatase Layer
- Electronic Structures of Bi_4Ti_3O_ Thin Film and Single Crystal Determined by Resonant Soft-X-Ray Emission Spectroscopy
- Protonic Conduction in the Single Crystal of Sc-Doped SrZrO_3
- Ti-O Hybridization Effect of Lightly La-doped SrTiO_3 Observed by Resonant-Photoemission Spectroscopy
- Electronic Structure in the Bulk State of Protonic Conductor CaZrO_3 by Resonant Soft-X-Ray Emission Spectroscopy : Electrical Properties of Condensed Matter
- Protonic Conduction in the Single Crystal of SrTi_Sc_xO_3 (Short Note)
- Deflection of Light Induced by Ferroelectric-ferroelasic Crystals : O: Optoelectronics
- Deflection of Light by Ferroelastic Potassium Trihydrogen Selenite
- Deflection of Light by Ferroelastic Domains in Gd_2(MoO_4)_3 and Bi_4Ti_3O_ Crystals
- Refraction and Reflection of Light at Ferroelastic Domain Walls in Rochelle Salt Crystal
- Evaluation of ferroelectric hysteresis loops of leaky multiferroic BiFeO3 films using a system with a high driving frequency of 100 kHz system
- Photoemission Study on Protonic Conductor CaZrO_3:Evidence of the Exchange Mechanism of Proton and Hole
- Electronic Structure of Bi_4Ti_3O_ Thin Film by Soft-X-Ray Emission Spectroscopy
- Simulation of Switching Properties of Ferroelectrics on the Basis of Dipole Lattice Model
- Grain Size Dependence of Switching Properties of Ferroelectric BaTiO_3 Ceramics
- Electronic Structure of 4d Transition Metal Compound ZrF_4 by Resonant Photoemission Spectroscopy
- Ti-O Hybridization Effect of Nb-Doped SrTiO_3 by Resonant Photoemission Spectroscopy : Electrical Properties of Condensed Matter
- Ti-O Hybridization Effect on Ferroelectric Phase Transition of BaTiO_3
- THz-Radiation Emitter and Receiver System Based on a 2 T Permanent Magnet, 1040 nm Compact Fiber Laser and Pyroelectric Thermal Receiver : Optics and Quantum
- Preparation of Various Oxide Films by an Electrophoretic Deposition Method : A Study of the Mechanism
- BaTiO_3 Single Crystal Growth by Travelling Solvent Floating Zone Technique : Fundamentals
- Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt)2(DPM)2
- Variation in 111 d-Space and Generation of Hillocks in Platinum Thin-Film Electrodes by Heat Treatment
- Improvement in Step Coverage of Pb(Zr, Ti)O_3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition
- Piezoelectric Properties of Sodium Bismuth Tantalate Na_Bi_Ta_2O_9 Dense Ceramics
- Improvement in Homogeneity and Ferroelectric Property on Mist Deposition Derived Pb(Zr, Ti)O_3 Thin Films by Substrate Surface Treatment
- Fabrication of Ferroelectric Pb(Zr, Ti)O_3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition(Surfaces, Interfaces, and Films)
- Crystal Growth and Characterization of Lanthanum Substituted Bismuth Titanate Single Crystals
- Electronic Structure of Delafossite-Type Metallic Oxide PdCoO_2
- Optical Study on Domain Formation in NH_4BeF_3
- Domain Structure and Deflection of Light at Domain Walls in RbHSeO_4
- Protonic Conduction in the Single Crystals of SrZr_M_O_3 (M = Y, Sc, Yb, Er)
- Growth of Ba_2NaNb_5O_ Thin Films on MgO(100) by the Pulsed Laser Ablation Method
- Effects of Postannealing in Oxygen Ambient on Leakage Properties of (Ba, Sr)TiO_3 Thin-Film Capacitors
- Effect of Laser Energy Density on the Fabrication of Ba_2NaNb_5O_ Thin Films by Pulsed Laser Ablation
- Control of the Orientation of Ferroelectric Bi_4Ti_3O_ Thin Films by Multi-step Metal Organic Decomposition Process
- Micropatterning of Ferroelectric Bi_4Ti_3O_ Using Electron-Beam-Induced Reaction of Metal Octylate Films
- Crystallization of Precursor Micropatterns of Ferroelectric Bi_4Ti_3O_ Fabricated by Electron Beam Scanning
- Fabrication of PbTiO_3 Thin Films on TiSi_2/Si and Their Characterization ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Fabrication of Ferroelectric Bi_4Ti_3O_ Thin Films by Dipping Pyrolysis of Metal Naphthenates and Micropatterns by an Electron Beam ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Structural Analysis of Polycrystalline BiFeO_3 Films by Transmission Electron Microscopy
- Preparation of Ferroelectric Bi_4Ti_3O_ Thin Films with c-Axis Orientation by Atmospheric-Pressure Metal-Organic Chermical Vapor Deposition
- Evaluation of Electrical Properties of Leaky BiFeO3 Films in High Electric Field Region by High-Speed Positive-Up--Negative-Down Measurement
- Growth of Bi_4Ti_3O_ Thin Film by Two-Dimensional RF Magnetron Sputtering with Bi_2O_3 and TiO_2 Targets (Short Note)
- Thermooptic Property of Polycrystalline BiFeO3 Film
- Investigation on Thickness Effect of Ultrathin Vinylidene Fluoride/Trifluoroethylene Copolymer Films
- Influence of SrRuO3 Bottom Electrode Thickness on Electric Properties of (Bi,Pr)(Fe,Mn)O3 Ultra-Thin Film Capacitor
- Estimation of Leakage Current Density and Remanent Polarization of BiFeO3 Films with Low Resistivity by Positive, Up, Negative, and Down Measurements
- Electronic Structure in Valence Band of Nd-Substituted Bi4Ti3O12 Single Crystal Probed by Soft-X-Ray Emission Spectroscopy
- Recrystallization and Microstructure in Electrophoretically Deposited Ferroelectric BaTiO_3 Films under CO_2-Laser Irradiation ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Fabrication of Ferroelectric BaTiO_3 Films by Electrophoretic Deposition
- Synthesis and Properties of Semiconducting Iron Disilicide β-FeSi_2
- Properties of Ferroelectric Pb(Zr, Ti)O_3 Thin Films on TiSi_2/Si Substrates
- Deflection of Light by Ferroelectric-Ferroelastic RbHSeO_4
- Ba_2NaNb_5O_ Thin Films Prepared by the Pulsed Laser Ablation Method
- Effects of O_2 Gas Pressure in Heat Treatment on Surface Morphology and Electric Properties of Ferroelectric Bi_4Ti_3O_ Thin Films with c-Axis Orientation
- O_2 Gas Pressure Effects on Surface Morphology in Ferroelectric Bi_4Ti_3O_ Thin Films Fabricated by Spin-Coating Pyrolysis
- Electric-Field-Induced Polarization Enhancement of Vinylidene Fluoride/Trifluoroethylene Copolymer Ultrathin Films
- Annealing Temperature Dependences of Ferroelectric and Magnetic Properties in Polycrystalline Co-Substituted BiFeO3 Films
- Composition dependence in BiFeO3 film capacitor with suppressed leakage current by Nd and Mn cosubstitution and their ferroelectric properties
- Formation Mechanism of Oriented Pb(Zr,Ti)O3 Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition
- Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt)2(DPM)2
- Structural Analyses of Co- and Mn-Substituted BiFeO Polycrystalline Films
- Estimation of Parasitic Capacitance in Measurement of Hysteresis Properties of Ferroelectric Microcapacitors Using Scanning Probe Microscope
- Fabrication of (Bi,Pr)(Fe,Mn)O Thin Films on Polycrystalline Diamond Substrates by Chemical Solution Deposition and Their Properties (Special Issue : Ferroelectric Materials and Their Applications)
- Optical Properties of BiFeO3-System Multiferroic Thin Films
- Electronic Structure of (Pb,La)(Zr,Ti)O3 Thin Film Probed by Soft-X-Ray Spectroscopy
- Electronic Structure in the Band-Gap Region of Protonic Conductor SrZr0.90Y0.10O3-δ
- Electrooptic and Piezoelectric Properties of (Pb,La)(Zr,Ti)O3 Films with Various Zr/Ti Ratios
- Ce–O Hybridization Effect of Protonic Conductor SrCe1-xYxO3-δ Observed by Resonant-Photoemission Spectroscopy
- Electronic Structures of Bi4-xLaxTi3O12 and Bi4ZrxTi3-xO12 Single Crystals Studied by Soft-X-Ray Spectroscopy
- Electronic Structure of Protonic Conductor BaCe0.90Y0.10O3-δ Probed by Soft-X-Ray Spectroscopy
- La Content Dependence of Electrooptic Properties of Polycrystalline (Pb,La)(Zr0.65,Ti0.35)O3 Thick Films
- Crystal Structure and Electrical Properties of {100}-Oriented Epitaxial BiCoO3–BiFeO3 Films Grown by Metalorganic Chemical Vapor Deposition
- Crystal Structure Analysis of Epitaxial BiFeO3–BiCoO3 Solid Solution Films Grown by Metalorganic Chemical Vapor Deposition
- Polarization Switching Dynamics of Vinylidene Fluoride/Trifluoroethylene Copolymer Thin Films under High Electric Field at Various Temperatures