Influence of SrRuO₃ Bottom Electrode Thickness on Electric Properties of (Bi,Pr)(Fe,Mn)O₃ Ultra-Thin Film Capacitor

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概要

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• (Pr,Mn)-codoped BiFeO₃ (BPFM) ultra-thin films of 85 nm thickness were deposited on a SrRuO₃ (SRO)-coated (100) Nb-doped SrTiO₃ substrate by pulsed laser deposition. Regardless of the SRO film thickness, the SRO and BPFM thin films showed perfectly ($h00$)-orientation on the substrate. On the other hand, the surface morphology and leakage current of the BPFM films strongly depended on the SRO film thickness. The BPFM ultra-thin film on a 115 nm thick SRO electrode shows a hysteresis loop without any influences of leakage current. The remnant polarization $2P_{\text{r}}$ and the coercive voltage $2V_{\text{c}}$ at the maximum applied voltage of 10 V are 82 μC/cm2 and 7.2 V, respectively.

• 2011-09-25

著者

• Okamura Soichiro

  Department Of Applied Physics Faculty Of Science Science University Of Tokyo

• Kawae Takeshi

  Graduate School Of Natural Science And Technology Kanazawa University

• Morimoto Akiharu

  Graduate School Of Natural Science And Technology Kanazawa University

• Terauchi Yuki

  Graduate School Of Pharmaceutical Sciences Chiba University

• Nakajima Takashi

  Department Network And Computer Engineering School Of Information And Design Engineering Tokai Unive

• Nakajima Takashi

  Department of Applied Physics, Faculty of Science, Tokyo University of Science, Shinjuku, Tokyo 162-8601, Japan

• Tsukada Yoshinori

  Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan

• Nomura Yukihiro

  Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan

• Terauchi Yuki

  Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan

• Morimoto Akiharu

  Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan

• Kawae Takeshi

  Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan

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