Polarization and leakage current properties of bismuth sodium titanate ceramic films deposited by aerosol deposition method
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概要
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(Bi0.5Na0.5)TiO3 (BNT) dense ceramic films with a thickness of approximately 25 µm were deposited by an aerosol deposition method, and thieir ferroelectric and leakage current properties were investigated. The BNT films annealed at 1100°C represented the leakage current density (J) of 10−6 A/cm2, while the BNT films annealed at 800 and 1000°C led to a marked decrease in J. The J of order of 10−7 A/cm2 was obtained for the films annealed at 1000°C. The ceramic films annealed at 1000°C showed a remanent polarization (Pr) of 27 µC/cm2 which was larger than that of the ceramic films annealed at 800°C (a Pr of 7.4 µC/cm2).
著者
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AKEDO Jun
Advanced Process Technology Group, National Institute of Advanced Industrial Science and Technology
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Noguchi Yuji
Res. Center For Advanced Sci. And Technol. The Univ. Of Tokyo
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NOGUCHI Yuji
Research Center for Advanced Science and Technology, University of Tokyo
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Miyayama Masaru
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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SUZUKI Muneyasu
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Tec
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Noguchi Yuji
Research Center For Advanced Science And Technology The University Of Tokyo
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MIYAYAMA Masaru
Research Center for Advanced Science and Technology, The University of Tokyo
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AKEDO Jun
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
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