スパッタリング成膜への水の利用
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概要
- 論文の詳細を見る
- 2010-09-20
著者
-
阿部 良夫
北見工業大学マテリアル工学科
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Abe Yoshio
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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- スパッタリング成膜への水の利用
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