Oxidation and Morphology Change of Ru Films Caused by Sputter Deposition of Ta_2O_5 Films
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概要
- 論文の詳細を見る
- 2005-04-15
著者
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佐々木 克孝
Department Of Materials Science Kitami Institute Of Technology
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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KAWAMURA Midori
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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