Role of Reaction Products in F^- Production in Low-Pressure, High-Density CF_4 Plasmas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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SASAKI Koichi
Department of Electronics, Nagoya University
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Nakamoto M
Nagoya Univ. Nagoya Jpn
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笹木 敬司
北海道大学電子科学研究所
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Nakamoto Masahiko
Department Of Disaster And Emergency Medicine Graduate School Of Medical Sciences Kyushu University
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Takada N
Nagoya Univ. Nagoya Jpn
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Takada Noriharu
Department Of Electrical Engineering Nagoya University
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KADOTA Kiyoshi
Department of Electronics, Nagoya University
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Hayashi Daiyu
Department of Electronics, Nagoya University
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Hayashi D
Technische Univ. Eindhoven Eindhoven Nld
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Hayashi Daiyu
Department Of Applied Physics Technische Universiteit Eindhoven
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Kadota K
Department Of Electronics Nagoya University
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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Takada Noriharu
Department Of Electrical Engineering And Computer Science Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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