Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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SASAKI Koichi
Department of Electronics, Nagoya University
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Takada N
Nagoya Univ. Nagoya Jpn
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Takada Noriharu
Department Of Electrical Engineering Nagoya University
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KADOTA Kiyoshi
Department of Electronics, Nagoya University
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SHIBAGAKI Kanji
Department of Electrical and Electronic Engineering, Suzuka National College of Technology
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IIDA Tsuyoshi
Department of Electronics, Nagoya University
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Sasaki Kimihiro
Graduate School Of Natural Science And Technology Kanazawa University
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Iida Tsuyoshi
Department Of Electronics Nagoya University
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Kadota K
Department Of Electronics Nagoya University
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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Takada Noriharu
Department Of Electrical Engineering And Computer Science Nagoya University
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Sasaki Koh
Institute For Materials Research Tohoku University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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