Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-07-15

著者

• SASAKI Koichi

  Department of Electronics, Nagoya University

• Takada N

  Nagoya Univ. Nagoya Jpn

• Takada Noriharu

  Department Of Electrical Engineering Nagoya University

• KADOTA Kiyoshi

  Department of Electronics, Nagoya University

• SHIBAGAKI Kanji

  Department of Electrical and Electronic Engineering, Suzuka National College of Technology

• IIDA Tsuyoshi

  Department of Electronics, Nagoya University

• Sasaki Kimihiro

  Graduate School Of Natural Science And Technology Kanazawa University

• Iida Tsuyoshi

  Department Of Electronics Nagoya University

• Kadota K

  Department Of Electronics Nagoya University

• Kadota Kiyoshi

  Department Of Electronics Nagoya University

• Takada Noriharu

  Department Of Electrical Engineering And Computer Science Nagoya University

• Sasaki Koh

  Institute For Materials Research Tohoku University

• Sasaki Koichi

  Department Of Electrical Engineering And Computer Science Nagoya University

• SASAKI Koichi

  Department of Architecture, Faculty of Engineering, Tohoku University

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