Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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MATSUSHITA Jun
Department of Electronics, Nagoya University
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Matsushita Jun
Department Of Electronics Nagoya University
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