Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-10-30

著者

• SASAKI Koichi

  Department of Electronics, Nagoya University

• Sasaki Koichi

  Department Of Electrical Engineering And Computer Science Nagoya University

• GAO Junsi

  Department of Electrical Engineering and Computer Science, Nagoya University

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