Production of Radicals and Particulates by Interaction between High-Density Hydrogen Plasma and Graphite Plate
スポンサーリンク
概要
- 論文の詳細を見る
Laser-induced fluorescence was employed to detect CH, C2 and H radicals in high-density H2 plasma interacting with a graphite plate. The densities of the radicals were examined as functions of the gas pressure, the temperature of the graphite plate, and the radial distance from the plasma center. In addition, we observed the formation of particulates on the graphite plate irradiated by the high-density plasma column. By considering the experimental results, we conclude that the interaction between the high-density hydrogen plasma and the graphite plate is governed by a mechanism similar to reactive ion etching.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-10-15
著者
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GOTO Motoshi
National Insitute for Fusion Science
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MORITA Shigeru
National Insitute for Fusion Science
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MUTO Sadatsugu
National Insitute for Fusion Science
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Takada Noriharu
Department Of Electrical Engineering And Computer Science Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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ARAMAKI Mitsutoshi
Department of Electronics, Nagoya University
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MORITA Shigeru
National Institute for Fusion Science, Toki, Gifu 509-5292, Japan
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Maeda Toshiki
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Aramaki Mitsutoshi
Department of Electrical Engineering and Computer Science, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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Aramaki Mitsutoshi
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Takada Noriharu
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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