Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
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概要
- 論文の詳細を見る
The validity of actinometry for measurement of fluorine atom density was examined by comparing the results with those obtained by vacuum ultraviolet absorption spectroscopy. The experiments were carried out in high-density CF_4 and C_4F_8 plasmas excited by helicon-wave discharges. As a result, the error in the relative F atom density measured by actinometry was within a factor of 〜2 for the same working gas. On the other hand, the value of K in the actinometry relation n_F=Kn_<Ar>(I_F/I_<Ar>) was considerably different between the CF_4 and C_4F_8 plasmas. Hence evaluation of the absolute F atom density by actinometry is generally difficult, except for rough or__-der-estimation by substituting K≃2.
- 社団法人応用物理学会の論文
- 1997-09-15
著者
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SASAKI Koichi
Department of Electronics, Nagoya University
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KADOTA Kiyoshi
Department of Electronics, Nagoya University
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Sasaki Koichi
Department Of Electronics Nagoya University
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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KAWAI Yozo
Department of Electronics, Nagoya University
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Kawai Yozo
Department Of Electronics Nagoya University
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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