Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2005-06-10

著者

• SASAKI Koichi

  Department of Electronics, Nagoya University

• Nakamura Keiji

  Department of Electrical Engineering, Nagoya University

• Takada N

  Nagoya Univ. Nagoya Jpn

• Takada Noriharu

  Department Of Electrical Engineering Nagoya University

• NAFARIZAL Nayan

  Department of Electrical Engineering and Computer Science, Nagoya University

• SHIBAGAKI Kanji

  Department of Electrical and Electronic Engineering, Suzuka National College of Technology

• SAGO Yasumi

  ANELVA Corporation

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• 論文紹介 Two-Dimensional Distributions of Ti and Ti〔+〕Densities in High-Pressure Magnetron Sputtering Discharges
• Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
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