Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2005-06-10
著者
-
SASAKI Koichi
Department of Electronics, Nagoya University
-
Nakamura Keiji
Department of Electrical Engineering, Nagoya University
-
Takada N
Nagoya Univ. Nagoya Jpn
-
Takada Noriharu
Department Of Electrical Engineering Nagoya University
-
NAFARIZAL Nayan
Department of Electrical Engineering and Computer Science, Nagoya University
-
SHIBAGAKI Kanji
Department of Electrical and Electronic Engineering, Suzuka National College of Technology
-
SAGO Yasumi
ANELVA Corporation
関連論文
- Composition of Positive Ions in High-Density H_2 Plasmas Measured by Time-of-Flight Mass Spectrometry
- Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
- Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
- Production of Vanadium-Carbon Clusters Using DC Arc Discharges with Pulsed Helium/Methane Gas Injection
- Analytical Expression Based Design of a Low-Voltage FD-SOI CMOS Low-Noise Amplifier(Analog Circuit Techniques and Related Topics)
- Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
- A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
- Formation of C_2 Radicals in High-Density C_4F_8 Plasmas Studied by Laser-Induced Fluorescence
- Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas
- Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
- Surface Kinetics of CF_x Radicals and Fluorine Atoms in the Afterglow of High-Density C_4F_8 Plasmas
- Lifetime Measurements of CF_x Radicals and H Atoms in Afterglow of CF_4/H_2 Plasmas
- Loss Processes of CF and CF_2 Radicals in the Afterglow of High-Density CF_4 Plasmas
- Investigations of production processes of Ti[+] in high-pressure magnetron sputtering plasmas
- 論文紹介 Two-Dimensional Distributions of Ti and Ti〔+〕Densities in High-Pressure Magnetron Sputtering Discharges
- Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
- Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas
- Synthesis of Heavy Carbon Clusters by Laser Ablation in Vacuum
- Spatial Distribution of H Atom Density in High-Density, Helicon-Wave H_2 Plasmas Measured by Laser-Induced Fluorescence
- Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
- Role of Reaction Products in F^- Production in Low-Pressure, High-Density CF_4 Plasmas
- Diagnostics of Fluorine Negative Ions by Laser Photodetachment Combined with a Heated Probe in High-Density CF_4 Plasmas
- Ultra-Sensitive Measurement of Sheath Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
- Experimental Study of the Spectral Characteristics of a High Power, Pulsed D_2O Laser for Application to Plasma Diagnostics
- Cross Section Measurements for Electron-Impact Dissociation of CHF_3 into Neutral and Ionic Radicals
- Environmental regulation of abult diapause of Graphosoma rubrolineatum (Westwood) (Heteroptera : Pentatomidae) in southern and northern populations of Japan
- Right Paranephric Abscess as a Rare Late Complication of Laparoscopic Cholecystectomy
- High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma ( Plasma Processing)
- Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF_4 and C_4F_8 Plasmas
- Characteristics of Fluorine Negative Ions in Helicon-Wave Excited High-Density Carbon-Tetrafluoride Plasmas (負イオン特集)
- Effects of photoperiod and temperature on the induction of adult diapause in Dolycoris baccarum (L.) (Heteroptera: Pentatomidae) from Osaka and Hokkaido, Japan
- Growth Processes of Nanoparticles in Liquid-Phase Laser Ablation Studied by Laser-Light Scattering
- Effect of Pressurization on the Dynamics of a Cavitation Bubble Induced by Liquid-Phase Laser Ablation
- Early Gastric Cancer Manifested as Brain Metastasis: Report of a Case
- Bile Peritonitis Due to a Spontaneous Perforation of the Common Bile Duct : Report of a Case
- Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target
- Development of a Compact Divertor Simulator Excited by Helicon-Wave Discharge
- Production of Carbon Clusters Using Plasma Chemical Vapor Deposition in He/CH_4 Glow Discharge
- Reflectivity Characteristics of Carbon Materials Irradiated with Hvdrogen Ion-Beam
- Numerical Study on Mode Structure of an Optically-Pumped 385 μm D_2O Laser
- Two-Frequency Operation of a Hybrid TEA CO_2 Laser and Its Application to Two-Frequency Pulse Injection Locking
- Pulse Injection-Locked TEA CO_2 Laser for Long Pulse Operation with Feedback Stabilization
- Theoretical Model and Numerical Simulation of Two-Longitudinal-Mode Oscillation in an Injection-Locked TEA CO_2 Laser
- Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
- Decay Processes of Electrons in the Afterglow of High-Density CF_4, c-C_4F_8 and CF_4-H_2 Plasmas
- Deposition of Tungsten Carbide Thin Films by Simultaneous RF Sputtering
- Collisional Quenching of C_2(d^3Π_g) and C^3(A^1〜Π_u) and Its Application to the Estimation of Absolute Particle Density in Laser-Ablation Carbon Plumes
- Ar/O_2 gas pressure dependence of atomic components of zirconia prepared by intermittent zirconium arc PBII&D
- Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
- Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
- Observation of Stark Spectra of Argon High Rydberg States in Well-Defined Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
- Correlation between Metastable and Ground-State Fluorine Atom Densities Measured by Laser-Induced Fluorescence and Vacuum Ultraviolet Absorption Spectroscopies : Nuclear Science, Plasmas, and Electric Discharges
- Dramatic Enhancement of OH(A2Σ+) Density in a Recombining Hydrogen Plasma
- Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges
- Investigations of Production Processes of Ti+ in High-Pressure Magnetron Sputtering Plasmas
- Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum