Deposition of Tungsten Carbide Thin Films by Simultaneous RF Sputtering
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Nakamura Keiji
Department of Electrical Engineering, Nagoya University
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Takaki Koichi
Department Of Electrical And Electronic Engineering Iwate University
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Suda Yoshiyuki
Graduate School Of Engineering Tokyo University Of Agriculture And Technology
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Sakai Yosuke
Graduate School Of Engineering Hokkaido University
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Takaki K
Department Of Electrical And Electronic Engineering Iwate University
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YUKIMURA Ken
Department of Electrical Engineering, Faculty of Engineering, Doshisha University
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