Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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SASAKI Koichi
Department of Electronics, Nagoya University
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SUZUKI Chihiro
Department of Neurology, Tohoku University Graduate School of Medicine
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笹木 敬司
北海道大学電子科学研究所
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Sasaki K
Nagoya Univ. Nagoya Jpn
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KADOTA Kiyoshi
Department of Electronics, Nagoya University
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Usui Kenichiro
Department of Electronics, Nagoya University
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Suzuki Chihiro
Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Science
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Usui K
Department Of Electronics Nagoya University
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Kadota K
Department Of Electronics Nagoya University
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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Suzuki Chihiro
Department Of Biomembrane And Biofunctional Chemistry Faculty Of Advanced Life Sciences Hokkaido Uni
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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