Toyoda Hirotaka | Plasma Nanotechnology Research Center Nagoya University

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概要

• 同名の論文著者
• Plasma Nanotechnology Research Center Nagoya Universityの論文著者

関連著者

• Toyoda Hirotaka

  Plasma Nanotechnology Research Center Nagoya University

• Ishijima Tatsuo

  Plasma Nanotechnology Research Center Nagoya University

• Goto Kazuya

  Department Of Applied Chemistry Faculty Of Engineering Kyushu University

• Kinoshita Keizo

  Device Platforms Research Laboratories Nec Corporation

• Ohshima Norikazu

  Device Platforms Research Laboratories Nec Corporation

• TOYODA Hirotaka

  Plasma Nanotechnology Research Center, Nagoya University

• ISHIJIMA Tatsuo

  Plasma Nanotechnology Research Center, Nagoya University

• MORITA Tadashi

  Tsukuba Institute for Super Materials, ULVAC, Inc.

• OHSHIMA Norikazu

  Device Platforms Research Laboratories, NEC Corporation

• Goto Kazuya

  Department Of Electrical Engineering And Computer Science Nagoya University

• Morita Tadashi

  Tsukuba Institute For Super Materials Ulvac Inc.

• Sugai Hideo

  Department O Electrical Engineering Nagoya University

• Kinoshita Keizo

  Device Platforms Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229-1198, Japan

• Toyoda Hirotaka

  Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan

• Takanishi Yudai

  Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

• Sugai Hideo

  Department of Electronics and Information Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan

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著作論文

• Fine Structure of O^- Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
• Design of Large-Area Surface Wave Plasma Excited by Slotted Waveguide Antennas with Novel Power Divider
• Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target

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