Morita Tadashi | Tsukuba Institute For Super Materials Ulvac Inc.
スポンサーリンク
概要
関連著者
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Goto Kazuya
Department Of Applied Chemistry Faculty Of Engineering Kyushu University
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Kinoshita Keizo
Device Platforms Research Laboratories Nec Corporation
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Morita Tadashi
Tsukuba Institute For Super Materials Ulvac Inc.
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Ishijima Tatsuo
Plasma Nanotechnology Research Center Nagoya University
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Ohshima Norikazu
Device Platforms Research Laboratories Nec Corporation
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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TOYODA Hirotaka
Plasma Nanotechnology Research Center, Nagoya University
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ISHIJIMA Tatsuo
Plasma Nanotechnology Research Center, Nagoya University
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MORITA Tadashi
Tsukuba Institute for Super Materials, ULVAC, Inc.
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OHSHIMA Norikazu
Device Platforms Research Laboratories, NEC Corporation
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Goto Kazuya
Department Of Electrical Engineering And Computer Science Nagoya University
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Toyoda Hirotaka
Plasma Nanotechnology Research Center Nagoya University
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Kinoshita Keizo
Device Platforms Research Laboratories, NEC Corporation, Sagamihara 229-1198, Japan
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Ono Kazunaga
Tsukuba Institute for Super Materials, ULVAC, Inc., Susono, Shizuoka 410-1231, Japan
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Yamamoto Hiroki
Tsukuba Institute for Super Materials, ULVAC, Inc., Susono, Shizuoka 410-1231, Japan
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Toyoda Hirotaka
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Morita Tadashi
Tsukuba Institute for Super Materials, ULVAC, Inc., Susono, Shizuoka 410-1231, Japan
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Ohshima Norikazu
Device Platforms Research Laboratories, NEC Corporation, Sagamihara 229-1198, Japan
著作論文
- Fine Structure of O^- Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
- Effect of O- Ion Beam Irradiation during RF-Magnetron Sputtering on Characteristics of CoFeB--MgO Magnetic Tunnel Junctions