Goto Kazuya | Department Of Electrical Engineering And Computer Science Nagoya University
スポンサーリンク
概要
関連著者
-
Goto Kazuya
Department Of Electrical Engineering And Computer Science Nagoya University
-
Goto Kazuya
Department Of Applied Chemistry Faculty Of Engineering Kyushu University
-
Kinoshita Keizo
Device Platforms Research Laboratories Nec Corporation
-
TOYODA Hirotaka
Plasma Nanotechnology Research Center, Nagoya University
-
ISHIJIMA Tatsuo
Plasma Nanotechnology Research Center, Nagoya University
-
MORITA Tadashi
Tsukuba Institute for Super Materials, ULVAC, Inc.
-
OHSHIMA Norikazu
Device Platforms Research Laboratories, NEC Corporation
-
Toyoda Hirotaka
Plasma Nanotechnology Research Center Nagoya University
-
Morita Tadashi
Tsukuba Institute For Super Materials Ulvac Inc.
-
Ishijima Tatsuo
Plasma Nanotechnology Research Center Nagoya University
-
Ohshima Norikazu
Device Platforms Research Laboratories Nec Corporation
著作論文
- Fine Structure of O^- Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
- Spatial variation of negative oxygen ion energy distribution in RF magnetron plasma with oxide target