Spatial variation of negative oxygen ion energy distribution in RF magnetron plasma with oxide target

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Goto Kazuya

  Department Of Electrical Engineering And Computer Science Nagoya University

関連論文

• Fine Structure of O^- Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism
• Spatial variation of negative oxygen ion energy distribution in RF magnetron plasma with oxide target

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