Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target
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概要
- 論文の詳細を見る
The energy distribution of negative oxygen (O-) ions and its spatial variation was measured in an RF magnetron plasma using a mass analyzer with an energy analyzer. O- ions with kinetic energies higher than 50 eV were observed during the sputtering of MgO. Spatial variation of the O- energy distribution was observed and was explained using a simple equivalent circuit model.
- 2009-11-25
著者
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Goto Kazuya
Department Of Applied Chemistry Faculty Of Engineering Kyushu University
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Kinoshita Keizo
Device Platforms Research Laboratories Nec Corporation
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Toyoda Hirotaka
Plasma Nanotechnology Research Center Nagoya University
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Ishijima Tatsuo
Plasma Nanotechnology Research Center Nagoya University
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Ohshima Norikazu
Device Platforms Research Laboratories Nec Corporation
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Kinoshita Keizo
Device Platforms Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229-1198, Japan
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Toyoda Hirotaka
Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
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