Measurement of Diffusion Coefficient of CF_2 Radical in DC Pulsed CF_4/H_2 Discharge Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-10-15

著者

• 後藤 誠

  北陸職業能力開発大学校

• Horikoshi Keita

  Department Of Electrical Engineering Kanagawa Institute Of Technology

• Murakami M

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Fujioka Hiroyuki

  Department Of Orthopedic Surgery Kobe University Graduate School Of Medicine

• ARAI Toshihiko

  Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology

• GOTO Miki

  Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology

• TAKAYAMA Daisuke

  Toshiba Lighting & Technology Corporation

• SHIMIZU Tetsuya

  Fujitsu Limited

• MURAKAMI Masahiko

  Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology

• Goto M

  Matsushita Electric Industrial Co.

• Arai Takeshi

  The Faculty Of Engineering Saitama University

• Fujioka Hiroyuki

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Shimizu T

  Univ. Occupational And Environmental Health Jpn

• GOTO Masashi

  Matsushita Electric Industrial Co.

• Shimizu Tadao

  Department Of Physics University Of Tokyo

• Shimizu T

  Department Of Electrical And Electronic Engineering Kanazawa University

• Murakami Masahiko

  Department Of Chemical Engineering Tohoku University

• 新井 豊子

  金大院自然

• Goto Miki

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Arai Toshihiko

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Shimizu T

  Chiba Univ. Chiba Jpn

• Takayama Daisuke

  Toshiba Lighting & Technology Corporation

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