Monte Carlo Simulation of RF Plasmas and Trial Investigation of Similarity Rule
スポンサーリンク
概要
- 論文の詳細を見る
Detailed properties of RF plasmas sustained by an RF external source of 13.56 MHz and 270 V are presented using self-consistent Monte Carlo simulations in an Ar-like model gas. It is shown that most of the RF external electric field is absorbed in the sheath regions and ions cannot follow the RF field. The time-dependent distribution of the number of excitation collisions is shown to give a physical picture of the moving sheath boundary which oscillates with the RF electric field. It is shown that a lower gas pressure yields a distribution with a wider sheath region which gives dominantly the capacitive component of impedance. A trial investigation of the similarity rule for the bulk region of RF plasmas is presented with respect to the electric field, the electron density, the conduction current density, and the mean electron velocity in the direction of the current.
- 1996-02-15
著者
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後藤 誠
北陸職業能力開発大学校
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MATSUOKA Akio
Department of Electrical Engineering, Gunma University
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ISHII Masayoshi
Department of Electronic Engineering, Gunma University
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Kondoh Yoshiomi
Department Of Electrical Engineering College Of Technology Gunma University
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Onozato Atsushi
Department Of Electronic Engineering Faculty Of Engineering Gunma University
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Sugawara Minoru
Department Of Electrical Engineering Faculty Of Engineering Gumma University
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Goto Makoto
Department Of Electronic Engineering Kanto Polytechnic College
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Goto Makoto
Department Of Chemistry Tohoku University & Crest
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後藤 誠
日電アネルバ株式会社
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Kondoh Yoshiomi
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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Ishii Masayoshi
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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Onozato Atsushi
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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Sugawara Minoru
Department of Electrical Engineering, Hachinohe Institute of Technology, Hachinohe, Aomori 031, Japan
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Matsuoka Akio
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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Goto Makoto
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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GOTO Makoto
Department of Aerospace Engineering, Nagoya University
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