Monte Carlo Simulation of Discharge Plasmas Using Fine Subslabs
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概要
- 論文の詳細を見る
A self-consistent Monte Carlo modelling technique has been developed to study discharge plasmas. The fine subslab technique and weight probability method are introduced. These two methods are applied to a DC Ar-like gas discharge simulation. The disharge profiles obtained are in good agreement with the experimental ones. The electron energy loss mechanism in the cathode region is explained in detail. The electron energy distribution variation in the cathode fall and flat plasma density regions are expressed in a wide range of magnitude. The electron mean energy profile has a local minimum point which corresponds to the maximum excitation collision point. An electron group with the energy of 6 to 10 eV is observed in the flat plasma density region. This energy corresponds to the potential differnce from the maximum excitation collision point to this flat region. Electron energy distributions have a wide range of over 6 orders of magnitude with only 5000 test particles.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
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後藤 誠
北陸職業能力開発大学校
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MATSUOKA Akio
Department of Electrical Engineering, Gunma University
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Kondoh Yoshiomi
Department Of Electrical Engineering College Of Technology Gunma University
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Goto Makoto
Department Of Electronic Engineering Gunma University
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Goto Makoto
Department Of Chemistry Tohoku University & Crest
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後藤 誠
日電アネルバ株式会社
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Matsuoka Akio
Department of Electronic Engineering, Gunma University, Kiryu, Gunma 376, Japan
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GOTO Makoto
Department of Aerospace Engineering, Nagoya University
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